Laboratory Micro-X-Ray Fluorescence Spectroscopy

Instrumentation and Applications

  • Michael Haschke

Part of the Springer Series in Surface Sciences book series (SSSUR, volume 55)

Table of contents

  1. Front Matter
    Pages i-xviii
  2. Michael Haschke
    Pages 1-17
  3. Michael Haschke
    Pages 19-118
  4. Michael Haschke
    Pages 119-156
  5. Michael Haschke
    Pages 157-199
  6. Michael Haschke
    Pages 201-209
  7. Michael Haschke
    Pages 211-227
  8. Michael Haschke
    Pages 229-341
  9. Michael Haschke
    Pages 343-348
  10. Back Matter
    Pages 349-356

About this book


Micro-X-ray fluorescence offers the possibility for a position- sensitive and non-destructive analysis that can be used for the analysis of non-homogeneous materials and layer systems. This analytical technique has shown a dynamic development in the last 15 years and is used for the analysis of small particles, inclusions, of elemental distributions for a wide range of different applications both in research and quality control. The first experiments were performed on synchrotrons but there is a requirement for laboratory instruments which offers a fast and immediate access for analytical results. The book discuss the main components of a µ-XRF instrument and the different measurement modes, it gives an overview about the various instruments types, considers the special requirements for quantification of non-homogeneous materials and presents a wide range of application for single point and multi-point analysis as well as for distribution analysis in one, two and three dimensions.


Components of X-ray Spectrometers Distribution Analysis Examination of Bulk Samples and Layer Systems Micro-X-ray Fluorescence Non-destructive Analysis Single Point, Multi-dimensional and Spatial Resolved Element Analysis X-Ray Spectrometers

Authors and affiliations

  • Michael Haschke
    • 1
  1. 1.EggersdorfGermany

Bibliographic information