© 2014

Subsecond Annealing of Advanced Materials

Annealing by Lasers, Flash Lamps and Swift Heavy Ions

  • Wolfgang Skorupa
  • Heidemarie Schmidt
  • Written by leading researchers in the field

  • Describes annealing-related processes in semiconductor technology

  • Includes a broad range of examples


Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 192)

Table of contents

  1. Front Matter
    Pages I-XVII
  2. Matthias Voelskow, Rossen A. Yankov, Wolfgang Skorupa
    Pages 1-13
  3. Danilo Bürger, Shengqiang Zhou, Marcel Höwler, Xin Ou, György J. Kovacs, Helfried Reuther et al.
    Pages 15-33
  4. J. Fiedler, V. Heera
    Pages 57-78
  5. S. Ghosh, H. Kumar, S. P. Singh, P. Srivastava, D. Kabiraj, D. K. Avasthi et al.
    Pages 107-121
  6. Ryoichi Ishihara, M. R. Tajari Mofrad, Ming He, C. I. M. Beenakker
    Pages 123-138
  7. Denise Reichel, T. Schumann, W. Skorupa, W. Lerch, J. Gelpey
    Pages 211-228
  8. P. J. Timans, G. Xing, J. Cibere, S. Hamm, S. McCoy
    Pages 229-270
  9. Katarzyna Wiesenhütter, Wolfgang Skorupa
    Pages 271-295
  10. Shengqiang Zhou, Danilo Bürger, Heidemarie Schmidt
    Pages 297-314
  11. Back Matter
    Pages 315-321

About this book


The thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.


Activation of Dopants Annealing by Swift Heavy Ions Epitaxial Growth of Silicon Explosive Crystallisation Flash Lamp Annealing Pulsed Laser Annealing Radiation Thermometry Sub-second Annealing Thermal Processing of Materials Thermal Spike-induced Nanostructuring

Editors and affiliations

  • Wolfgang Skorupa
    • 1
  • Heidemarie Schmidt
    • 2
  1. 1.Inst. Ionenstrahlphysik und Materialforschung, Abt. Neue MaterialienHelmholtz-Zentrum Dresden-RossendorfDresdenGermany
  2. 2.Materialsysteme der Nanoelektronik Nano-Spintronics GroupChemnitz University of TechnologyChemnitzGermany

Bibliographic information

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