MEMS and Nanotechnology, Volume 5

Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics

  • Gordon Shaw III
  • Barton C. Prorok
  • LaVern Starman
  • Cosme Furlong
Conference proceedings

Table of contents

  1. Front Matter
    Pages i-viii
  2. Ningning Du, George F. Raiser, W. Carter Ralph
    Pages 1-9
  3. Md Hasnine, Muhannad Mustafa, Jeffrey C. Suhling, Barton C. Prorok, Michael J. Bozack, Pradeep Lall
    Pages 11-22
  4. Satyajit Walwadkar, Christopher Kovalchick, Wade Hezeltine, Frank Liang, Alan McAllister
    Pages 23-31
  5. W. Carter Ralph, Gregory L. Daspit, Andrew W. Cain, Elizabeth E. Benedetto, Randall S. Jenkins, Aileen M. Allen et al.
    Pages 33-42
  6. Naved A. Siddiqui, Seon-Bae Kim, Dong-Joo Kim, Ruel A. Overfelt, Barton C. Prorok
    Pages 43-48
  7. Benjamin Toler, Brent Danner, Derrick Langley, Ronald Coutu Jr.
    Pages 49-55
  8. Derrick Langley, Ronald A. Coutu Jr., Peter J. Collins
    Pages 57-62
  9. LaVern A. Starman, Vladimir Vasilyev
    Pages 63-71
  10. Nathan E. Glauvitz, Ronald A. Coutu Jr., Michael Kistler, Ivan R. Medvedev, Douglas T. Petkie
    Pages 73-79
  11. MariAnne Sullivan, Barton C. Prorok
    Pages 89-95
  12. Jennifer Hay, Phillip Agee
    Pages 97-101
  13. L. E. Bain, A. M. Hosalli, S. M. Bedair, T. Paskova, A. Ivanisevic
    Pages 109-114
  14. Joshua A. Schultz, Stephen M. Heinrich, Fabien Josse, Isabelle Dufour, Nicholas J. Nigro, Luke A. Beardslee et al.
    Pages 115-124
  15. J. A. Deibel, H. R. Jones, A. Fosnight, R. Shaver, E. Best, D. Langley et al.
    Pages 129-134

About these proceedings


MEMS and Nanotechnology, Volume 5: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics, the fifth volume of eight from the Conference, brings together contributions to this important area of research and engineering.  The collection presents early findings and case studies on a wide range of areas, including:


Microelectronics Packaging

Single Atom/Molecule Mechanical Testing

MEMS Devices & Fabrication

In-Situ Mechanical Testing


Experimental Analysis of Low-Dimensional Materials for Nanotechnology


Devices & Fabrication Measurement Challenges Nanoindentation Nanotribology Optical Methods Residual Stress SEM 2013 Single Molecule/single Atom Mechanical Testing Size Effects in Metals

Editors and affiliations

  • Gordon Shaw III
    • 1
  • Barton C. Prorok
    • 2
  • LaVern Starman
    • 3
  • Cosme Furlong
    • 4
  1. 1.NISTGaithersburgUSA
  2. 2.Auburn UniversityAuburnUSA
  3. 3.Air Force Research LaboratoryWright-Patterson AFBUSA
  4. 4.Worcester Polytechnic InstituteWorcesterUSA

Bibliographic information

  • DOI
  • Copyright Information The Society for Experimental Mechanics, Inc 2014
  • Publisher Name Springer, Cham
  • eBook Packages Engineering
  • Print ISBN 978-3-319-00779-3
  • Online ISBN 978-3-319-00780-9
  • Series Print ISSN 2191-5644
  • Series Online ISSN 2191-5652
  • Buy this book on publisher's site
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