© 2019


Fabricating Microelectromechanical Systems in Open Use Labs


Table of contents

  1. Front Matter
    Pages i-xvi
  2. Deborah Munro
    Pages 1-9
  3. Deborah Munro
    Pages 11-19
  4. Deborah Munro
    Pages 21-30
  5. Deborah Munro
    Pages 31-47
  6. Deborah Munro
    Pages 49-55
  7. Deborah Munro
    Pages 57-65
  8. Deborah Munro
    Pages 67-74
  9. Deborah Munro
    Pages 75-76
  10. Deborah Munro
    Pages 77-79
  11. Deborah Munro
    Pages 81-94
  12. Deborah Munro
    Pages 95-96
  13. Deborah Munro
    Pages 97-108
  14. Deborah Munro
    Pages 109-134
  15. Deborah Munro
    Pages 135-140
  16. Deborah Munro
    Pages 141-149
  17. Deborah Munro
    Pages 151-170
  18. Deborah Munro
    Pages 171-173
  19. Deborah Munro
    Pages 175-177
  20. Deborah Munro
    Pages 179-182

About this book


This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

  • Introduces the MEMS fabrication processes and equipment
  • Explains how to take the first steps - where to start and get initial advice and further assistance
  • Includes a global list of MEMS facilities and resources with contact information


Actuators Cleanrooms DIY Fabrication Lithography MEMS MEMS Packaging Microelectromechanical systems Microfabrication Nanotechnology National Nanotechnology Infrastructure Network NNCI Open use labs Soft materials Biomedical Engineering

Authors and affiliations

  1. 1.College of EngineeringUniversity of CanterburyChristchurchNew Zealand

About the authors

Dr. Deborah Munro is a Senior Lecturer in the bioengineering track within the mechanical engineering department at the University of Canterbury, Christchurch, and has more than 30 years of experience in mechanical and biomedical engineering. She earned her bachelor’s degree in mechanical engineering from the University of the Pacific, her master’s degree in mechanical engineering from Stanford University, and her doctorate in biological systems engineering from the University of California at Davis. 

Bibliographic information

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