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DIY MEMS

Fabricating Microelectromechanical Systems in Open Use Labs

  • Deborah Munro
Book

Table of contents

  1. Front Matter
    Pages i-xvi
  2. Deborah Munro
    Pages 1-9
  3. Deborah Munro
    Pages 11-19
  4. Deborah Munro
    Pages 21-30
  5. Deborah Munro
    Pages 31-47
  6. Deborah Munro
    Pages 49-55
  7. Deborah Munro
    Pages 57-65
  8. Deborah Munro
    Pages 67-74
  9. Deborah Munro
    Pages 75-76
  10. Deborah Munro
    Pages 77-79
  11. Deborah Munro
    Pages 81-94
  12. Deborah Munro
    Pages 95-96
  13. Deborah Munro
    Pages 97-108
  14. Deborah Munro
    Pages 109-134
  15. Deborah Munro
    Pages 135-140
  16. Deborah Munro
    Pages 141-149
  17. Deborah Munro
    Pages 151-170
  18. Deborah Munro
    Pages 171-173
  19. Deborah Munro
    Pages 175-177
  20. Deborah Munro
    Pages 179-182
  21. Deborah Munro
    Pages 183-183
  22. Back Matter
    Pages 185-188

About this book

Introduction

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

  • Introduces the MEMS fabrication processes and equipment
  • Explains how to take the first steps - where to start and get initial advice and further assistance
  • Includes a global list of MEMS facilities and resources with contact information

Keywords

Actuators Cleanrooms DIY Fabrication Lithography MEMS MEMS Packaging Microelectromechanical systems Microfabrication Nanotechnology National Nanotechnology Infrastructure Network NNCI Open use labs Soft materials Biomedical Engineering

Authors and affiliations

  • Deborah Munro
    • 1
  1. 1.College of EngineeringUniversity of CanterburyChristchurchNew Zealand

Bibliographic information

Industry Sectors
Electronics
Aerospace
Engineering