A Practical Guide to Surface Metrology

  • Michael Quinten

Table of contents

  1. Front Matter
    Pages i-xxv
  2. Michael Quinten
    Pages 43-55
  3. Michael Quinten
    Pages 57-65
  4. Michael Quinten
    Pages 67-93
  5. Michael Quinten
    Pages 95-198
  6. Michael Quinten
    Pages 199-217
  7. Back Matter
    Pages 223-230

About this book


This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.

Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).

The book provides:

  • Overview of the working principles
  • Description of advantages and disadvantages
  • Currently achievable numbers for resolutions, repeatability, and reproducibility
  • Examples of real-world applications

A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.


Practical surface measurement Practical surface characterisation Surface optical metrology Scanning nearfield optical microscopy White light interferometry Confocal optical profiling Light sectional methods Multi-wavelength interferometry Grazing incidence interferometry Shearing interferometry Digital holographic microscopy Elastic light scattering Spectral Reflectometry and Ellipsometry

Authors and affiliations

  • Michael Quinten
    • 1
  1. 1.AldenhovenGermany

Bibliographic information

  • DOI
  • Copyright Information Springer Nature Switzerland AG 2019
  • Publisher Name Springer, Cham
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-030-29453-3
  • Online ISBN 978-3-030-29454-0
  • Series Print ISSN 2198-7807
  • Series Online ISSN 2198-7815
  • Buy this book on publisher's site