Toward Inertial-Navigation-on-Chip

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

  • Haoran Wen

Part of the Springer Theses book series (Springer Theses)

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Haoran Wen
    Pages 1-12
  3. Haoran Wen
    Pages 59-75
  4. Haoran Wen
    Pages 77-85
  5. Haoran Wen
    Pages 105-110
  6. Back Matter
    Pages 111-127

About this book


This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.


intertial sensing MEMS gyroscope multi-axis gyroscope resonant pitch and roll gyroscope inertial measurement unit intertial navigation wet-etching-based bulk micromachining wearable inertial sensor micro-gravity accelerometer

Authors and affiliations

  • Haoran Wen
    • 1
  1. 1.School of Electrical and Computer EngineeringGeorgia Institute of TechnologyAtlantaUSA

Bibliographic information