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Table of contents

  1. Front Matter
    Pages i-xvi
  2. Joshua Pelleg
    Pages 1-3
  3. Joshua Pelleg
    Pages 5-12
  4. Joshua Pelleg
    Pages 13-16
  5. Joshua Pelleg
    Pages 17-68
  6. Joshua Pelleg
    Pages 69-105
  7. Joshua Pelleg
    Pages 123-138
  8. Joshua Pelleg
    Pages 139-154
  9. Joshua Pelleg
    Pages 155-162
  10. Joshua Pelleg
    Pages 163-181
  11. Joshua Pelleg
    Pages 183-210
  12. Joshua Pelleg
    Pages 211-242
  13. Joshua Pelleg
    Pages 243-254
  14. Joshua Pelleg
    Pages 255-272
  15. Back Matter
    Pages 273-274

About this book

Introduction

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

Keywords

very large scale integration thermoelectric technology transition metal silicides Seebeck coefficient silicon based integrated circuits

Authors and affiliations

  • Joshua Pelleg
    • 1
  1. 1.Department of Materials EngineeringBen-Gurion University of the NegevBeer ShevaIsrael

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