© 2010

Chemical Vapour Deposition

An Integrated Engineering Design for Advanced Materials


Part of the Engineering Materials and Processes book series (EMP)

About this book


The rapid advancement in chemical vapour deposition (CVD) technology has reached many fields of application, including thin film coating, microelectronics and communications. Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials focuses on the application of this technology to engineering coatings and, in particular, to the manufacture of high performance materials, such as fibre reinforced ceramic composite materials, for structural applications at high temperatures.

While previous discourses on CVD have had a tendency to focus solely on electronics, this book aims to provide a thorough exploration of the design and applications of advanced materials, and their manufacture in engineering. It addresses a wide range of topics related to CVD theories and applications. From physical fundamentals and principles, to optimisation of processing parameters and other current practices, this book is designed to guide readers through the development of both high performance materials and the design of CVD systems to manufacture such materials.

Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials introduces integrated design and manufacture of advanced materials to researchers, industrial practitioners, postgraduates and senior undergraduate students. It also features a large body of appendices to provide references for further study.

The Engineering Materials and Processes series focuses on all forms of materials and the processes used to synthesise and formulate them as they relate to the various engineering disciplines. The series deals with a diverse range of materials: ceramics; metals (ferrous and non-ferrous); semiconductors; composites, polymers, biomimetics etc. Each monograph in the series is written by a specialist and demonstrates how enhancements in materials and the processes associated with them can improve performance in the field of engineering in which they are used.


Chemical Vapor Deposition (CVD) Chemical Vapor Infiltration (CVI) Engineering Design High Performance Materials Micro-manufacture coating dynamics materials

Authors and affiliations

  1. 1.School of Materials Science & EngineeringNorthwestern Polytechnical UniversityXianChina
  2. 2.Department of Design, Manufacture and Engineering ManagementUniversity of StrathclydeGlasgowUK

About the authors

Xiu-Tian Yan is a Senior Lecturer in the Department of Design, Manufacture and Engineering Management (DMEM) of the University of Strathclyde. He has been involved in three European Commission funded projects, promoting research exchange in engineering design and manufacture in Europe and Asia. He was a key researcher working on UK government funded Schemebuilder project from 1992-1994. He has 130 refereed publications in total, including 27 journal papers, 3 edited books, 15 book chapters, and 69 refereed international conference papers. He was an Invited Professor from March –August 2007 and was a Visiting Associate Professor at the University of Technology Troyes. He is also a Guest Professor and PhD adviser (since 2005) and Visiting Professor (since 2003) at Northwestern Polytechnical University, China. He has organised several international conferences/symposia and has been a technical paper reviewer for numerous international journals and conferences in his fields.

Yongdong Xu passed away shortly after completing this book. At the time of his death he was a professor of the School of Materials Science and Engineering of Northwestern Polytechnical University, and an internationally and nationally recognised researcher in chemical vapour deposition and fibre reinforced ceramic matrix composite materials.

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