Electron Beam Testing Technology

  • John T. L. Thong

Part of the Microdevices book series (MDPF)

Table of contents

  1. Front Matter
    Pages i-xvi
  2. Background to Electron Beam Testing Technology

  3. Part I

    1. Front Matter
      Pages 11-11
    2. J. T. L. Thong
      Pages 13-34
    3. J. T. L. Thong
      Pages 35-125
  4. Part II

    1. Front Matter
      Pages 127-127
    2. A. R. Dinnis
      Pages 129-173
    3. J. T. L. Thong
      Pages 241-287
    4. H. Beha, R. Clauberg
      Pages 289-313
    5. F. M. Boland, E. R. Lynch
      Pages 315-358
  5. Part III

    1. Front Matter
      Pages 359-359
    2. M. Battù, P. Garino, M. Melgara
      Pages 361-395
    3. D. W. Ranasinghe, I. G. Whyte, J.-P. Collin, G. V. Lukianoff
      Pages 417-444
  6. Back Matter
    Pages 445-462

About this book


Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.


Signal electron optics integrated circuit material optics testing

Editors and affiliations

  • John T. L. Thong
    • 1
  1. 1.Cambridge UniversityCambridgeEngland

Bibliographic information

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