© 1992

Contamination Control and Cleanrooms

Problems, Engineering Solutions, and Applications

  • Authors

Table of contents

  1. Front Matter
    Pages i-ix
  2. Alvin Lieberman
    Pages 1-8
  3. Alvin Lieberman
    Pages 25-41
  4. Alvin Lieberman
    Pages 54-72
  5. Alvin Lieberman
    Pages 73-81
  6. Alvin Lieberman
    Pages 101-114
  7. Alvin Lieberman
    Pages 115-127
  8. Alvin Lieberman
    Pages 144-156
  9. Alvin Lieberman
    Pages 157-170
  10. Alvin Lieberman
    Pages 199-216
  11. Alvin Lieberman
    Pages 232-240
  12. Alvin Lieberman
    Pages 241-246
  13. Alvin Lieberman
    Pages 247-253

About this book


Contamination control standards and techniques for all phases of the production of high-technology products are spelled out in this applications-orientated guide. Practical cleaning methods for products and process fluids are accompanied by tips on selecting operations based on economy and efficiency. Explanations of contaminant measurement devices cover operation, error sources and remedial methods. Engineers will find vital data on contaminant sources, as well as coverage of operations and procedures that aggravate contaminant effects.


HVAC calibration control correlation design efficiency filter liquid measurement mechanism mechanisms phase production protection validation

Bibliographic information

  • Book Title Contamination Control and Cleanrooms
  • Book Subtitle Problems, Engineering Solutions, and Applications
  • Authors Alvin Lieberman
  • DOI
  • Copyright Information Springer-Verlag US 1992
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Hardcover ISBN 978-0-442-00574-0
  • Softcover ISBN 978-1-4684-6514-3
  • eBook ISBN 978-1-4684-6512-9
  • Edition Number 1
  • Number of Pages , 424
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Topics Mechanical Engineering
  • Buy this book on publisher's site
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