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Contamination Control and Cleanrooms

Problems, Engineering Solutions, and Applications

  • Authors
  • AlvinĀ Lieberman
Book

Table of contents

  1. Front Matter
    Pages i-ix
  2. Alvin Lieberman
    Pages 1-8
  3. Alvin Lieberman
    Pages 25-41
  4. Alvin Lieberman
    Pages 54-72
  5. Alvin Lieberman
    Pages 73-81
  6. Alvin Lieberman
    Pages 101-114
  7. Alvin Lieberman
    Pages 115-127
  8. Alvin Lieberman
    Pages 144-156
  9. Alvin Lieberman
    Pages 157-170
  10. Alvin Lieberman
    Pages 199-216
  11. Alvin Lieberman
    Pages 232-240
  12. Alvin Lieberman
    Pages 241-246
  13. Alvin Lieberman
    Pages 247-253
  14. Alvin Lieberman
    Pages 254-263
  15. Alvin Lieberman
    Pages 264-273
  16. Alvin Lieberman
    Pages 274-289
  17. Alvin Lieberman
    Pages 290-309
  18. Alvin Lieberman
    Pages 310-316
  19. Alvin Lieberman
    Pages 317-330
  20. Alvin Lieberman
    Pages 369-380
  21. Alvin Lieberman
    Pages 381-392
  22. Alvin Lieberman
    Pages 393-406
  23. Back Matter
    Pages 407-411

About this book

Introduction

Contamination control standards and techniques for all phases of the production of high-technology products are spelled out in this applications-orientated guide. Practical cleaning methods for products and process fluids are accompanied by tips on selecting operations based on economy and efficiency. Explanations of contaminant measurement devices cover operation, error sources and remedial methods. Engineers will find vital data on contaminant sources, as well as coverage of operations and procedures that aggravate contaminant effects.

Keywords

HVAC calibration control correlation design efficiency filter liquid measurement mechanism mechanisms phase production protection validation

Bibliographic information

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