© 2013

Helium Ion Microscopy

Principles and Applications


Part of the SpringerBriefs in Materials book series (BRIEFSMATERIALS)

Table of contents

  1. Front Matter
    Pages i-viii
  2. David C. Joy
    Pages 1-3
  3. David C. Joy
    Pages 5-8
  4. David C. Joy
    Pages 9-15
  5. David C. Joy
    Pages 39-41
  6. David C. Joy
    Pages 43-48
  7. David C. Joy
    Pages 49-49
  8. David C. Joy
    Pages 51-53
  9. David C. Joy
    Pages 55-55
  10. Back Matter
    Pages 57-64

About this book


Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined.

  • Serves as a concise but authoritative introduction to the latest innovation in scanning microscopy
  • Compares ion and electron beams as options for microscopy
  • Presents a detailed physical model of ion-solid interactions and signal generation
  • Provides a detailed database of iSE yield behavior as a function of the target ion, element, and energy


Backscattered ion imaging Detecting ion beam signals HIM HIM charging and damage HIM with a GFIS HIM with a GFIS, practical issues Helium Ion Microscopy Helium ion microscopy how-to Helium ion microscopy operation Helium ion microscopy user guide Helium ion microscopy, introduction Imaging depth of field Ion channeling contrast Ion Beam Induced Charging Ion Beams Ion Generated Damage Ion Induced Secondary Electrons Ion generated secondary electrons Ion –Solid Interactions and Image Formation Microanalysis with the HIM Microscopy with ions, history of Patterning and Nanofabrication, HIM SE and iSE comparison SE vs. iSE Scanning Ion Beam Microscope Scanning Transmission Ion Microscopy Secondary Ion Mass Spectrometry Sputter Damage The interaction volume Topographic contrast in the HIM iSE

Authors and affiliations

  1. 1.University of TennesseeKnoxvilleUSA

Bibliographic information

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From the reviews:

“Helium Ion Microscopy, Principles and Applications, is a compact volume of 64 pages, and is useful to anyone wishing fundamental knowledge on this topic. … There are many features of this book that make it a useful resource for both the beginning and advanced microscopist. … this book provides a novice researcher an initial resource to determine if this methodology is useful to their particular area and to determine what trade-offs are necessary.” (Michael T. Postek, Microscopy and Microanalysis, Vol. 20 (2), 2014)