Semiconductor Lithography

Principles, Practices, and Materials

  • Wayne M. Moreau

Part of the Microdevices book series (MDPF)

Table of contents

  1. Front Matter
    Pages i-xx
  2. Wayne M. Moreau
    Pages 1-27
  3. Wayne M. Moreau
    Pages 29-79
  4. Wayne M. Moreau
    Pages 81-155
  5. Wayne M. Moreau
    Pages 157-210
  6. Wayne M. Moreau
    Pages 211-257
  7. Wayne M. Moreau
    Pages 259-327
  8. Wayne M. Moreau
    Pages 329-353
  9. Wayne M. Moreau
    Pages 355-408
  10. Wayne M. Moreau
    Pages 409-458
  11. Wayne M. Moreau
    Pages 459-544
  12. Wayne M. Moreau
    Pages 545-566
  13. Wayne M. Moreau
    Pages 567-630
  14. Wayne M. Moreau
    Pages 631-777
  15. Wayne M. Moreau
    Pages 779-812
  16. Wayne M. Moreau
    Pages 813-855
  17. Wayne M. Moreau
    Pages 857-895
  18. Wayne M. Moreau
    Pages 897-919
  19. Back Matter
    Pages 921-931

About this book


Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the resist pattern acting as a mask, a permanent device structure is formed by subtractive (removal) etching or by additive deposition of metals or insulators. Each process step in lithography uses inorganic or organic materials to physically transform semiconductors of silicon, insulators of oxides, nitrides, and organic polymers, and metals, into useful electronic devices. All forms of electromagnetic radiation are used in the processing. Lithography is a mUltidisciplinary science of materials, processes, and equipment, interacting to produce three-dimensional structures. Many aspects of chemistry, electrical engineering, materials science, and physics are involved. The purpose of this book is to bring together the work of many scientists and engineers over the last 10 years and focus upon the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.


circuit electrical engineering integrated circuit logic manufacturing semiconductor transistor

Authors and affiliations

  • Wayne M. Moreau
    • 1
  1. 1.General Technology DivisionInternational Business Machines CorporationNew YorkUSA

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