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Precision Motion Control

Design and Implementation

  • Tan Kok Kiong
  • Lee Tong Heng
  • Dou Huifang
  • Huang Sunan

Part of the Advances in Industrial Control book series (AIC)

Table of contents

  1. Front Matter
    Pages i-xviii
  2. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 1-11
  3. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 13-74
  4. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 75-93
  5. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 95-112
  6. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 113-156
  7. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 157-171
  8. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 173-199
  9. Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan
    Pages 201-212
  10. Back Matter
    Pages 213-232

About this book

Introduction

Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes.
As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.

Keywords

control development error compensation geometrical error microelectromechanical system (MEMS) microscopy motion control nanotechnology precision control reliability research signal interpolation system design technology vibration

Authors and affiliations

  • Tan Kok Kiong
    • 1
  • Lee Tong Heng
    • 1
  • Dou Huifang
    • 1
  • Huang Sunan
    • 1
  1. 1.Department of Electrical EngineeringNational University of SingaporeSingapore

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4471-3691-0
  • Copyright Information Springer-Verlag London 2001
  • Publisher Name Springer, London
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4471-3693-4
  • Online ISBN 978-1-4471-3691-0
  • Series Print ISSN 1430-9491
  • Series Online ISSN 2193-1577
  • Buy this book on publisher's site
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