Advanced Mechatronics and MEMS Devices

  • Dan Zhang

Part of the Microsystems book series (MICT, volume 23)

Table of contents

  1. Front Matter
    Pages i-xi
  2. Iuri Frosio, Federico Pedersini, N. Alberto Borghese
    Pages 53-88
  3. Brandon K. Chen, Yu Sun
    Pages 89-98
  4. Yassine Haddab, Vincent Chalvet, Qiao Chen, Philippe Lutz
    Pages 99-116
  5. Peng Peng, Rajesh Rajamani
    Pages 141-163
  6. Claudia Pagano, Irene Fassi
    Pages 165-178
  7. Xuan Wu, Dapeng Wang, Aiwu Zhao, Da Li, Tao Mei
    Pages 179-191
  8. Weiting Liu, Fei Li, Xin Fu, Cesare Stefanini, Paolo Dario
    Pages 193-206
  9. Weiting Liu, Fei Li, Xin Fu, Cesare Stefanini, Gabriella Bonsignori, Umberto Scarfogliero et al.
    Pages 207-221
  10. Back Matter
    Pages 241-249

About this book


Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also:

  • Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices
  • Presents numerous applications of MEMS technology in robotics, using novel applications of micro-robots based on MEMS design and implementation
  • Uses an extensive number of case studies

Advanced Mechatronics and MEMS Devices is an ideal book for engineers,researchers, and graduate students who are interested in mechatronics and MEMS technology.


MEMS MEMS Sensors Mechatronic Microsystems Robotics

Editors and affiliations

  • Dan Zhang
    • 1
  1. 1., Faculty of Engineering and Applied ScienUniversity of Ontario Institute of TechnOshawaCanada

Bibliographic information

  • DOI
  • Copyright Information Springer Science+Business Media New York 2013
  • Publisher Name Springer, New York, NY
  • eBook Packages Engineering
  • Print ISBN 978-1-4419-9984-9
  • Online ISBN 978-1-4419-9985-6
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site
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