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© 2016

Fundamental Aspects of Plasma Chemical Physics

Kinetics

  • Presents and discusses elected examples in different applied fields, such as microelectronics, fusion, and aerospace

  • Provides detailed descriptions of the state-to-state kinetic approach for benchmark plasma systems through worked examples

  • Approaches the subject completely by assessing both fundamental concepts and problems still open in the research community

  • Presents the third volume in a series of three about plasma chemistry with a focus on the electron and heavy particle kinetics in non-equilibrium plasmas emphasizing the coupling between the two kinetics

Book

Part of the Springer Series on Atomic, Optical, and Plasma Physics book series (SSAOPP, volume 85)

Table of contents

  1. Front Matter
    Pages i-xvi
  2. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 1-30
  3. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 31-56
  4. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 57-78
  5. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 79-111
  6. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 113-142
  7. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 143-173
  8. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 175-204
  9. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 205-222
  10. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 223-245
  11. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 247-273
  12. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 275-303
  13. Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni et al.
    Pages 305-312
  14. Back Matter
    Pages 313-318

About this book

Introduction

Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.

The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

Keywords

Boltzmann equation Electron-molecule cross sections excited states fundamentals of plasma chemical physics kinetic and Monte Carlo approaches low temperature plasmas molecular plasmas non equilibrium plasma plasma kinetics

Authors and affiliations

  1. 1.Dipartimento di ChimicaUniversity of Bari and CNRBariItaly
  2. 2.Dipartimento di Ingegneria Civile, Ambientale, del Territorio, Edile e di Chimica (DICATECh)Polytechnic of BariBariItaly
  3. 3.IMIP CNRBariItaly
  4. 4.IMIP CNRBariItaly
  5. 5.University of Bari and CNRBariItaly
  6. 6.Laboratoire des Sciences des Procédés et des Matériaux, CNRS-INSISParisFrance
  7. 7.Consiglio Nazionale delle RicercheBariItaly
  8. 8.University of Bari and CNRBariItaly

About the authors

Mario Capitelli, University of Bari, mario.capitelli@ba.imip.cnr.it

Gianpiero Colonna, IMIP CNR

Fabrizio Esposito, IMIP CNR

Khaled Hassouni, Institut Galilee-Univeriste Paris

Annarita Laricchiuta, IMIP CNR

Savino Longo, University of Bari

Bibliographic information

  • Book Title Fundamental Aspects of Plasma Chemical Physics
  • Book Subtitle Kinetics
  • Authors Mario Capitelli
    Roberto Celiberto
    Gianpiero Colonna
    Fabrizio Esposito
    Claudine Gorse
    Khaled Hassouni
    Annarita Laricchiuta
    Savino Longo
  • Series Title Springer Series on Atomic, Optical, and Plasma Physics
  • Series Abbreviated Title SS Atomic, Opt., Plasma Phys.
  • DOI https://doi.org/10.1007/978-1-4419-8185-1
  • Copyright Information Springer New York 2016
  • Publisher Name Springer, New York, NY
  • eBook Packages Physics and Astronomy Physics and Astronomy (R0)
  • Hardcover ISBN 978-1-4419-8184-4
  • Softcover ISBN 978-1-4939-4163-6
  • eBook ISBN 978-1-4419-8185-1
  • Series ISSN 1615-5653
  • Series E-ISSN 2197-6791
  • Edition Number 1
  • Number of Pages XVI, 318
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Topics Plasma Physics
    Physical Chemistry
    Theoretical, Mathematical and Computational Physics
    Classical Mechanics
  • Buy this book on publisher's site
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Aerospace
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Reviews

“The work will be a valuable resource for researchers using many applications involving nonequilibrium cold plasmas such as plasma beams, etching, cleaning, deposition, surface activation, and gas lasers. … Extensive references are provided, chapter-by-chapter, in addition to useful tables of reactions and processes with descriptions and references. … Summing Up: Recommended. Graduate students, researchers/faculty, and professionals/practitioners.” (T. Eastman, Choice, Vol. 53 (10), June, 2016)