MEMS Linear and Nonlinear Statics and Dynamics

  • Mohammad I.¬†Younis

Part of the Microsystems book series (MICT, volume 20)

Table of contents

  1. Front Matter
    Pages 1-1
  2. Mohammad I. Younis
    Pages 1-12
  3. Mohammad I. Younis
    Pages 13-56
  4. Mohammad I. Younis
    Pages 57-96
  5. Mohammad I. Younis
    Pages 97-153
  6. Mohammad I. Younis
    Pages 155-249
  7. Mohammad I. Younis
    Pages 251-357
  8. Mohammad I. Younis
    Pages 401-442
  9. Back Matter
    Pages 440-440

About this book


MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:

  • Includes examples of numerous MEMS devices and structures that require static or dynamic modeling including accelerometers, gyroscopes, and Atomic Force Microscopes.
  • Offers real world problems related to the dynamics of MEMS such as  static and dynamic pull-in, buckling,  and failure due to capillary forces.
  • Presents in-depth treatment of the statics and dynamics of electrostatic MEMS including universal pull-in curves and natural frequencies of common microbeams, performance analysis of micromirrors and torsional actuators, nonlinear dynamics of MEMS resonators and associated phenomena, as well as design issues related to comb-drive actuators.
  • Features detailed discussions of the effect of mechanical shock on microstructures.

MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design, modeling, and characterization.


MEMS devices linear statics lumped modeling principles modeling principles nonlinear mechanics nonlinear statics static modeling stiction

Authors and affiliations

  • Mohammad I.¬†Younis
    • 1
  1. 1.Dept. Mechanical EngineeringState University of New York, BinghamtonBinghamtonUSA

Bibliographic information

  • DOI
  • Copyright Information Springer Science+Business Media, LLC 2011
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-1-4419-6019-1
  • Online ISBN 978-1-4419-6020-7
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site
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