© 2011

MEMS Reliability


Part of the MEMS Reference Shelf book series (MEMSRS)

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 1-7
  3. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 9-42
  4. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 43-83
  5. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 85-177
  6. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 179-214
  7. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 215-252
  8. Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
    Pages 253-288
  9. Back Matter
    Pages 289-291

About this book


Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS reliability because of specific high volume manufacturing experience generally view the details of a reliability program as a competitive advantage and are reluctant to share it. MEMS Reliability focuses on the reliability and manufacturability of MEMS at a fundamental product engineering level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (PoF), accelerated testing and lifetime prediction, design strategies for improving yield, design for reliability (DfR), packaging and testing. Drawing upon years of practical experience and using numerous examples and illustrative applications, Allyson Hartzell, Mark da Silva, and Herbert Shea cover:

• How to design & manufacture MEMS components for reliability by focusing on basic tools such as reliability statistics, CAD methodologies, FMEA, tools & instruments for failure analysis, and product development methodologies.

• The different types of failure modes for silicon and metal-based MEMS, including failures originating in the design and manufacturing phases, and in-use failures (electrical, mechanical, and environmental) and how to avoid them.

• The testing and qualification procedures for MEMS reliability and the specific test protocols for accelerating specific MEMS- failures, leading to enhanced reliability understanding and accurate lifetime prediction.

MEMS Reliability will be of interest to engineers,researchers, and product managers involved in the production and development, of MEMS who want to learn more about determining and improving product reliability and implementing such practices within their own organizations.

"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. This series, authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus


MEMS MEMS reliability design for reliability design strategies failure analysis failure mechanisms packaging and testing process development and characterization

Authors and affiliations

  1. 1.Lilliputian Systems, Inc.WilmingtonUSA
  2. 2.RSTC, MS-112Analog Devices Inc.WilmingtonUSA
  3. 3., Microsystems for Space TechnologiesEPFLNeuchatelSwitzerland

Bibliographic information

  • Book Title MEMS Reliability
  • Authors Allyson L. Hartzell
    Mark G. da Silva
    Herbert R. Shea
  • Series Title MEMS Reference Shelf
  • Series Abbreviated Title MEMS Reference Shelf
  • DOI
  • Copyright Information Springer Science + Business Media, LLC 2011
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Hardcover ISBN 978-1-4419-6017-7
  • Softcover ISBN 978-1-4614-2736-0
  • eBook ISBN 978-1-4419-6018-4
  • Series ISSN 1936-4407
  • Edition Number 1
  • Number of Pages XIII, 291
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Topics Electronics and Microelectronics, Instrumentation
  • Buy this book on publisher's site
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