© 2010

RF MEMS Switches and Integrated Switching Circuits

Design, Fabrication, and Test


Part of the MEMS Reference Shelf book series (MEMSRS, volume 5)

Table of contents

  1. Front Matter
    Pages i-x
  2. Ai Qun Liu
    Pages 1-20
  3. Ai Qun Liu
    Pages 22-64
  4. Ai Qun Liu
    Pages 65-82
  5. Ai Qun Liu
    Pages 83-113
  6. Ai Qun Liu
    Pages 189-206
  7. Ai Qun Liu
    Pages 207-227
  8. Ai Qun Liu
    Pages 229-264
  9. Back Matter
    Pages 265-271

About this book


Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.


Filter MEMS RF MEMS RF Switches Transistor design integrated switching circuits mechanical design microelectromechanical system (MEMS) microelectronics micromachined switching circuits modeling tunable electromagnetic bandgap

Authors and affiliations

  1. 1.School of Electrical & Electronic, EngineeringNanyang Technological UniversitySingaporeSingapore

Bibliographic information

  • Book Title RF MEMS Switches and Integrated Switching Circuits
  • Book Subtitle Design, Fabrication, and Test
  • Authors Ai-Qun Liu
  • Series Title MEMS Reference Shelf
  • Series Abbreviated Title MEMS Reference Shelf
  • DOI
  • Copyright Information Springer Science+Business Media, LLC 2010
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Hardcover ISBN 978-0-387-46261-5
  • Softcover ISBN 978-1-4614-2656-1
  • eBook ISBN 978-0-387-46262-2
  • Series ISSN 1936-4407
  • Edition Number 1
  • Number of Pages X, 274
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Topics Circuits and Systems
    Mechanical Engineering
    Electronics and Microelectronics, Instrumentation
  • Buy this book on publisher's site
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