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© 2003

Electron-Beam Interactions with Solids

Application of the Monte Carlo Method to Electron Scattering Problems

  • Maurizio Dapor
Book

Part of the Springer Tracts in Modern Physics book series (STMP, volume 186)

Table of contents

  1. Front Matter
    Pages I-VIII
  2. Pages 1-4
  3. Pages 17-42
  4. Pages 43-52
  5. Pages 95-98
  6. Pages 99-103
  7. Back Matter
    Pages 105-109

About this book

Introduction

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Keywords

Cross section Electron Beams Electron Scattering Monte Carlo elastic scattering scattering thin film

Editors and affiliations

  • Maurizio Dapor
    • 1
  1. 1.Centro per la ricerca scientifica e tecnologicaPovo (Trento)Italy

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