Advertisement

Electron-Beam Interactions with Solids

Application of the Monte Carlo Method to Electron Scattering Problems

  • Maurizio┬áDapor

Part of the Springer Tracts in Modern Physics book series (STMP, volume 186)

Table of contents

  1. Front Matter
    Pages I-VIII
  2. Pages 1-4
  3. Pages 17-42
  4. Pages 43-52
  5. Pages 95-98
  6. Pages 99-103
  7. Back Matter
    Pages 105-109

About this book

Introduction

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Keywords

Cross section Electron Beams Electron Scattering Monte Carlo elastic scattering scattering thin film

Editors and affiliations

  • Maurizio┬áDapor
    • 1
  1. 1.Centro per la ricerca scientifica e tecnologicaPovo (Trento)Italy

Bibliographic information

  • DOI https://doi.org/10.1007/3-540-36507-9
  • Copyright Information Springer-Verlag Berlin Heidelberg 2003
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-540-00652-7
  • Online ISBN 978-3-540-36507-5
  • Series Print ISSN 0081-3869
  • Buy this book on publisher's site
Industry Sectors
Chemical Manufacturing
Electronics