© 2003

Transmission Electron Microscopy of Semiconductor Nanostructures: Analysis of Composition and Strain State

  • Up-to-date overview

  • No related/competitive literature on the market

  • Covers fundamentals and current topics of TEM

  • Highly important technology for future production of nanostructures


Part of the Springer Tracts in Modern Physics book series (STMP, volume 182)

Table of contents

  1. Front Matter
    Pages I-XII
  2. Introduction

    1. Pages 1-9
  3. Theoretical Fundamentals of Transmission Electron Microscopy

    1. Pages 13-32
    2. Pages 33-53
  4. Digital Image Analysis

  5. Applications

    1. Pages 139-145
    2. Pages 169-192
    3. Pages 209-210
  6. Back Matter
    Pages 213-240

About this book


This book provides tools well suited for the
quantitative investigation of semiconductor electron microscopy. These tools allow for the accurate determination of the composition of ternary semiconductor
nanostructures with a spatial resolution at near atomic scales. The book
focuses on new methods including strain state
analysis as well as evaluation of the composition
via the lattice fringe analysis (CELFA) technique.
The basics of these procedures as well as their
advantages, drawbacks and sources of error are all
discussed.  The techniques are applied to quantum
wells and dots in order to give insight into
kinetic growth effects such as segregation and

In the first part of the book the fundamentals of
transmission electron microscopy are provided.
These are needed for an understanding of the
digital image analysis techniques described in the
second part of the book.  There the reader will
find information on different methods of
composition determination.  The third part of the
book focuses on applications such as composition
determination in InGaAs Stranski--Krastanov
quantum dots.  Finally it is shown how an
improvement in the precision of the composition
evaluation can be obtained by combining CELFA with
electron holography.  This is demonstrated for an
AlAs/GaAs superlattice.


Composition determination Quantum dots and quantum wells Segregation Ternary semiconductor nanostructures electron microscopy holography microscopy transmission electron microscopy

Authors and affiliations

  1. 1.Lab. Electron MicroscopyUniversity KarlsruheKarlsruheGermany

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