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© 1983

Sputtering by Particle Bombardment II

Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

  • Editors
  • Rainer Behrish
Book

Part of the Topics in Applied Physics book series (TAP, volume 52)

Table of contents

  1. Front Matter
  2. Rainer Behrisch
    Pages 1-10
  3. Gerhard Betz, Gottfried K. Wehner
    Pages 11-90
  4. Joachim Roth
    Pages 91-146
  5. Peter C. Townsend
    Pages 147-178
  6. Rainer Behrisch
    Pages 179-229
  7. George Carter, Boris Navinšek, James L. Whitton
    Pages 231-269
  8. Back Matter

About this book

Keywords

Elektronenstrahlung Festkörper Ionenbeschuss Neutronenstrahlung Oberfläche compound development electron electrons heavy ion ion neutron photon Plantation

Bibliographic information

  • Book Title Sputtering by Particle Bombardment II
  • Book Subtitle Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
  • Editors R. Behrisch
  • Series Title Topics in Applied Physics
  • Series Abbreviated Title Top Appl Phys
  • DOI https://doi.org/10.1007/3-540-12593-0
  • Copyright Information Springer-Verlag 1983
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Hardcover ISBN 978-3-540-12593-8
  • Softcover ISBN 978-3-662-31169-1
  • eBook ISBN 978-3-540-38659-9
  • Series ISSN 0303-4216
  • Series E-ISSN 1437-0859
  • Edition Number 1
  • Number of Pages XIII, 394
  • Number of Illustrations 0 b/w illustrations, 0 illustrations in colour
  • Topics Solid State Physics
    Spectroscopy and Microscopy
  • Buy this book on publisher's site
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