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© 1981

Sputtering by Particle Bombardment I

Physical Sputtering of Single-Element Solids

  • Editors
  • Rainer¬†Behrisch
Book

Part of the Topics in Applied Physics book series (TAP, volume 47)

Table of contents

  1. Front Matter
  2. Rainer Behrisch
    Pages 1-8
  3. Mark T. Robinson
    Pages 73-144
  4. Hans Henrik Andersen, Helge L. Bay
    Pages 145-218
  5. Hans E. Roosendaal
    Pages 219-256
  6. Back Matter

About this book

Keywords

boundary element method concept crystal ion measurement particle solid

Bibliographic information

  • Book Title Sputtering by Particle Bombardment I
  • Book Subtitle Physical Sputtering of Single-Element Solids
  • Editors R. Behrisch
  • Series Title Topics in Applied Physics
  • Series Abbreviated Title Top Appl Phys
  • DOI https://doi.org/10.1007/3-540-10521-2
  • Copyright Information Springer-Verlag 1981
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Hardcover ISBN 978-3-540-10521-3
  • Softcover ISBN 978-3-662-30888-2
  • eBook ISBN 978-3-540-38514-1
  • Series ISSN 0303-4216
  • Series E-ISSN 1437-0859
  • Edition Number 1
  • Number of Pages XI, 284
  • Number of Illustrations 19 b/w illustrations, 0 illustrations in colour
  • Topics Solid State Physics
    Spectroscopy and Microscopy
  • Buy this book on publisher's site
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