© 2006

Mechanics of Microelectronics

  • G. Q. Zhang
  • W. D. Van Driel
  • X. J. Fan


  • Covers issues essential for current and future development of Microelectronics and Microsystems

  • Provides a systematic overview for not only the state-of-the-art, but also future roadmap and perspectives of Microelectronics and Microsystems and the associated mechanics

  • The contents have an optimal balance between theoretical knowledge and industrial applications, written by the leading experts with both profound theoretical achievement and rich industrial experience

  • Parts of the contents are first hand results from research and development projects funded by the European Commission


Part of the Solid mechanics and its applications book series (SMIA, volume 141)

Table of contents

  1. Front Matter
    Pages i-xiii
  2. A. J. van Roosmalen
    Pages 1-34
  3. F. G. Kuper, X. J. Fan
    Pages 35-63
  4. H. J. Eggink, J. H. J. Janssen
    Pages 65-94
  5. J. Zhou, G. Q. Zhang
    Pages 95-167
  6. W. D. van Driel, G. Q. Zhang, X. J. Fan
    Pages 169-279
  7. X. J. Fan, G. Q. Zhang, W. D. van Driel, J. Zhou
    Pages 281-375
  8. G. Q. Zhang, N. Tzannetakis, W. D. van Driel
    Pages 469-536
  9. G. Q. Zhang
    Pages 537-563
  10. Back Matter
    Pages 565-571

About this book


From a mechanical engineering point of view, Microelectronics and Microsystems are multi-scale in both geometric and time domains, multi-process, multi-functionality, multi-disciplinary, multi-material/interface, multi-damage and multi-failure mode. Their responses in manufacturing, assembling, qualification tests and application conditions are strongly nonlinear and stochastic. Mechanics of Microelectronics is extremely important and challenging, in terms of both industrial applications and academic research.

Written by the leading experts with both profound knowledge and rich practical experience in advanced mechanics and microelectronics industry, this book aims to provide the cutting edge knowledge and solutions for various mechanical related problems, in a systematic way. It contains essential and detailed information about the state-of-the-art theories, methodologies, the way of working and real case studies.


Computer-Aided Design (CAD) Simulation design development electronic packaging mechanical engineering mechanics microelectronics modeling optimization reliability stability statistics thermo-mechanics virtual prototyping

Editors and affiliations

  • G. Q. Zhang
    • 1
  • W. D. Van Driel
    • 1
  • X. J. Fan
    • 2
  1. 1.Philips Semiconductors and Delft University of TechnologyThe Netherlands
  2. 2.Intel CorporationUSA

Bibliographic information

Industry Sectors
Chemical Manufacturing
Consumer Packaged Goods
Energy, Utilities & Environment
Oil, Gas & Geosciences


From the reviews:

"This is an introductory treatise on the mechanism of microelectronics that has penetrated into every aspects of human life for the past half of a century. … The treatise should be of interest to both the academia and industry, and it can be used as a ‘basic source for teaching’ in a graduate course. … In sum, the authors have done a valuable service in presenting the title topic to researchers, engineers and students interested in the mechanics of microelectronics." (M. Cengiz Dökmeci, Zentralblatt MATH, Vol. 1105 (7), 2007)

"The editors of Mechanics of Microelectronics present this book, as their obligation, to graduate students in universities, researchers, engineers and managers in industries. … The book chapters are written by the worldwide leading experts with both profound theoretical achievement and rich industrial experience … . The book will be eagerly sought after by microelectronics and microsystems design engineers; process/product development engineers; reliability engineers; thermal, mechanical and multi-physics analysts; researchers, graduates and PhD students and their guides." (Current Engineering Practice, 2007)