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Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning

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Abstract

In non-contact atomic force microscopy, a feedback loop is used to maintain the set-point frequency relative to the force between the specimen and the cantilever. The quality factor of the cantilever affects the sensitivity of feedback loop. Therefore, the fabrication of a high-quality-factor cantilever to improve the scan speed of non-contact atomic force microscopy is highly desirable. Here, we optimized the thickness of the non-contact atomic force microscope’s cantilever to maximize the quality factor with a high resonant frequency. These maximized values reached about 1200 and 530 kHz, respectively. The corresponding scan rate was more than 0.12 mm/s, indicating that the cantilever can be used in high-speed non-contact atomic force microscopy.

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Authors and Affiliations

  1. Department of Physics, Incheon National University, Incheon, 22012, Korea

    Sebin Bahn & Soo Bong Choi

  2. Department of Physics and Astronomy and Center for Atom Scale Electromagnetism, Seoul National University, Seoul, 08826, Korea

    Woongkyu Park

  3. Nanodevices Lab, Device Technology Division, Korea Advanced Nano fab Center, Suwon, 16229, Korea

    Hae-Yong Jeong & Kyung-Ho Park

Authors
  1. Sebin Bahn
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  2. Soo Bong Choi
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  3. Woongkyu Park
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  4. Hae-Yong Jeong
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  5. Kyung-Ho Park
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Correspondence to Soo Bong Choi.

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Bahn, S., Choi, S.B., Park, W. et al. Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning. J. Korean Phys. Soc. 74, 94–97 (2019). https://doi.org/10.3938/jkps.74.94

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  • DOI: https://doi.org/10.3938/jkps.74.94

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