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Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method

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Abstract

To study the applications for ferroelectric non-volatile memory and ferroelectric memristor, etc., deposition pressure dependent electric the properties of (Hf, Zr)O2 thin films by RF sputtering deposition method were investigated. The bottom electrode was TiN thin film to produce stress effect on the formation of orthorhombic phase and top electrode was Pt thin film by DC sputtering deposition. Deposition pressure was varied along with the same other deposition conditions, for example, sputtering power, target to substrate distance, post-annealing temperature, annealing gas, annealing time, etc. The structural and electric properties of the above thin films were investigated. As a result, it is confirmed that the electric properties of the (Hf, Zr)O2 thin films depend on the deposition pressure which affects structural properties of the thin films, such as, structural phase, ratio of the constituents, etc.

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Authors and Affiliations

  1. ICT Materials Research Group, Electronics and Telecommunications Research Institute, Daejeon, 34129, Korea

    S. E. Moon, J. H. Kim, J. P. Im, J. Lee, S. Y. Im, S. H. Hong & S. Y. Kang

  2. Department of Advanced Engineering, University of Science and Technology, Daejeon, 34113, Korea

    S. E. Moon

  3. Advanced Materials Engineering for Information & Electronics, Kyung Hee University, Yongin, 17104, Korea

    S. M. Yoon

Authors
  1. S. E. Moon
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  2. J. H. Kim
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  3. J. P. Im
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  4. J. Lee
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  5. S. Y. Im
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  6. S. H. Hong
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  7. S. Y. Kang
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  8. S. M. Yoon
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Correspondence to S. E. Moon.

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Moon, S.E., Kim, J.H., Im, J.P. et al. Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method. J. Korean Phys. Soc. 73, 1712–1715 (2018). https://doi.org/10.3938/jkps.73.1712

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  • DOI: https://doi.org/10.3938/jkps.73.1712

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