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Recent Progress in Potassium Sodium Niobate Lead-free Thin Films

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Abstract

Lead-free potassium sodium niobate (KNN)-based thin films have attracted much interest in replacing current lead zirconate titanate (PZT)-based piezoelectric thin films in micro electromechanical (MEMS) devices due to the increasing awareness and legislation concerning lead oxide toxicity. Recently, promising piezoelectric performance has been achieved in KNN-based thin films by compositional modification. Over the last decade, our group has concentrated on the fabrication of KNN-based thin films using sol-gel and RF sputtering techniques and has obtained encouraging results. However, controlling the complex stoichiometric compositions in KNN-based thin films is still challenging due to volatilization of alkaline elements and the high leakage current density. In the current review, the available synthetic approaches, chemical modification strategies, and stabilizing agents used to try and overcome these challenges and improve the piezoelectric properties of KNN-based thin films are reviewed. Herein, we systematically describe the recent advancements of the ferroelectric and piezoelectric properties of KNN-based thin films and summarize the properties of KNN-based thin films fabricated by various techniques, such as sol-gel and RF magnetron sputtering.

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References

  1. A. J. Moulson and J. M. Herbert, Electroceramics: materials, properties, applications (John Wiley & Sons, 2003).

    Google Scholar 

  2. K. Uchinoin, Present status of piezoelectric/electrostrictive actuators and remaining problems Piezoelectric Actuators and Ultrasonic Motors, (Boston, MA: Kluwer, 1997).

    Google Scholar 

  3. S-E. Park and T. R. Shrout, J. Appl. Phys. 82, 1804 (1997).

    ADS  Google Scholar 

  4. W. Jo, R. Dittmer, M. Acosta, J. Zang, C. Groh, E. Sapper, K. Wang and J. Rödel, J. Electroceram. 29, 71 (2012).

    Google Scholar 

  5. T. Yamamoto, Jpn. J. Appl. Phys. 35, 5104 (1996).

    ADS  Google Scholar 

  6. E. Sawaguchi, J. Phys. Soc. Jpn. 8, 615 (1953).

    ADS  Google Scholar 

  7. D. Damjanovic, Reports on Progress in Phys. 61, 1267 (1998).

    ADS  Google Scholar 

  8. G. H. Haertling, J. Am. Ceram. Soc. 82, 797 (1999).

    Google Scholar 

  9. R. Directive, Off. J. Eur. Union 13, L37 (2003).

    Google Scholar 

  10. H. A. T. Directive, Off. J. Eur. Comm. 14, L315 (2000).

    Google Scholar 

  11. C. W. Ahn, C-H. Hong, B-Y. Choi, H-P. Kim, H-S. Han, Y. Hwang, W. Jo, K. Wang, J-F. Li and J-S. Lee, J. Korean Phys. Soc. 68, 1481 (2016).

    ADS  Google Scholar 

  12. J. Rödel, W. Jo, K. T. Seifert, E. M. Anton, T. Granzow and D. Damjanovic, J. Am. Ceram. Soc. 92, 1153 (2009).

    Google Scholar 

  13. G. Shirane, R. Newnham and R. Pepinsky, Phys. Rev. 96, 581 (1954).

    ADS  Google Scholar 

  14. Z. Wang, D. Xiao, J. Wu, M. Xiao, F. Li and J. Zhu, J. Am. Ceram. Soc. 97, 688 (2014).

    Google Scholar 

  15. X. Cheng, J. Wu, X. Wang, B. Zhang, J. Zhu, D. Xiao, X. Wang and X. Lou, Appl. Phys. Lett. 103, 052906 (2013).

    ADS  Google Scholar 

  16. K. Wang and J. F. Li, Adv. Func. Mater. 20, 1924 (2010).

    Google Scholar 

  17. J. Wu, Y. Wang, D. Xiao, J. Zhu and Z. Pu, Appl. Phys. Lett. 91, 132914 (2007).

    ADS  Google Scholar 

  18. G. Haertling, J. Am. Ceram. Soc. 50, 329 (1967).

    Google Scholar 

  19. L. Egerton and D. M. Dillon, J. Am. Ceram. Soc. 42, 438 (1959).

    Google Scholar 

  20. J. Wu, D. Xiao and J. Zhu, Chem. rev. 115, 2559 (2015).

    Google Scholar 

  21. P. Li, J. Zhai, B. Shen, S. Zhang, X. Li, F. Zhu and X. Zhang, Adv. Mater. 30, 1705171 (2018).

    Google Scholar 

  22. J. S. Kim, C. W. Ahn, S. Y. Lee, A. Ullah and I. W. Kim, Curr. Appl. Phys. 11, S149 (2011).

    Google Scholar 

  23. Y. Saito, H. Takao, T. Tani, T. Nonoyama, K. Takatori, T. Homma, T. Nagaya and M. Nakamura, Nature 432, 84 (2004).

    ADS  Google Scholar 

  24. W. Liang, W. Wu, D. Xiao and J. Zhu, J. Am. Ceram. Soc. 94, 4317 (2011).

    Google Scholar 

  25. K. H. Cho, H. Y. Park, C.W. Ahn, S. Nahm, K. Uchino, S. H. Park, H. G. Lee and H. J. Lee, J. Am. Ceram. Soc. 90, 1946 (2007).

    Google Scholar 

  26. E. Cross, Nature 432, 24 (2004).

    ADS  Google Scholar 

  27. Y. Guo, K-I. Kakimoto and H. Ohsato, Appl. phys. lett. 85, 4121 (2004).

    ADS  Google Scholar 

  28. Y. Guo, K-I. Kakimoto and H. Ohsato, Mater. Lett. 59, 241 (2005).

    Google Scholar 

  29. X. Wang, J. Wu, D. Xiao, J. Zhu, X. Cheng, T. Zheng, B. Zhang, X. Lou and X. Wang, J. Am. chem. soc. 136, 2905 (2014).

    Google Scholar 

  30. D. Xiao, J. Wu, L. Wu, J. Zhu, P. Yu, D. Lin, Y. Liao and Y. Sun, J. Mater. Sci. 44, 5408 (2009).

    ADS  Google Scholar 

  31. J. F. Li, K. Wang, F. Y. Zhu, L. Q. Cheng and F. Z. Yao, J. Am. Ceram. Soc. 96, 3677 (2013).

    Google Scholar 

  32. N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Park and G. Stephenson, J. Appl. Phys. 100, 051606 (2006).

    ADS  Google Scholar 

  33. P. Muralt, J. Am. Ceram. Soc. 91, 1385 (2008).

    Google Scholar 

  34. C-B. Eom and S. Trolier-McKinstry, Thin-film piezoelectric MEMS, Mrs Bulletin 37, 1007 (2012).

    Google Scholar 

  35. J-C. Yu and F-H. Lai, Ferroelectrics 263, 101 (2001).

    Google Scholar 

  36. A. Nickles, R. Ramesh, R. White and E. Haller, Integ. Ferroelectrics 10, 89 (1995).

    Google Scholar 

  37. C. Lee, T. Itoh and T. Suga, Thin solid films 299, 88 (1997).

    ADS  Google Scholar 

  38. C-R. Cho, A. Grishin and B-M. Moon, Integ. Ferroelectrics 31, 35 (2000).

    Google Scholar 

  39. K. Tanaka, K-I. Kakimoto and H. Ohsato, J. cryst. growth 294, 209 (2006).

    ADS  Google Scholar 

  40. T. Saito, H. Adachi and T. Wada, Jpn. J Appl. Phys. 44, L573 (2005).

    Google Scholar 

  41. K. Tanaka, K-I. Kakimoto, H. Ohsato and T. Iijima, Jpn. J. Appl. Phys. 46, 1094 (2007).

    ADS  Google Scholar 

  42. Y. Nakashima, W. Sakamoto, H. Maiwa, T. Shimura and T. Yogo, Jpn. J. Appl. Phys. 46, L311 (2007).

    ADS  Google Scholar 

  43. T. Saito, T. Wada, H. Adachi and I. Kanno, Jpn. J. Appl. Phys. 43, 6627 (2004).

    ADS  Google Scholar 

  44. J. Ryu, J-J. Choi, B-D. Hahn, D-S. Park, W-H. Yoon and K-H. Kim, Appl. Phys. Lett. 90, 152901 (2007).

    ADS  Google Scholar 

  45. C-R. Cho, Mater. Lett. 57, 781 (2002).

    Google Scholar 

  46. L. Wang, K. Yao and W. Ren, Appl. Phys. Lett. 93, 092903 (2008).

    ADS  Google Scholar 

  47. J. Ryu, J-J. Choi, B-D. Hahn, D-S. Park and W-H. Yoon, Appl. Phys. Lett. 92, 012905 (2008).

    ADS  Google Scholar 

  48. A. Safari and M. Abazari, IEEE transactions on ultrasonics, ferroelectrics and frequency control 57, 2165 (2010).

    Google Scholar 

  49. P. C. Goh, K. Yao and Z. Chen, Appl. Phys. Lett. 97, 102901 (2010).

    ADS  Google Scholar 

  50. A. D. Handoko and G. K. Goh, Cryst. Eng. Comm. 15, 672 (2013).

    Google Scholar 

  51. C-R. Cho and A. Grishin, J. Appl. Phys. 87, 4439 (2000).

    ADS  Google Scholar 

  52. K. Shibata, F. Oka, A. Ohishi, T. Mishima and I. Kanno, Appl. Phys. Express 1, 011501 (2008).

    ADS  Google Scholar 

  53. C-R. Cho and A. Grishin, Appl. Phys. Lett. 75, 268 (1999).

    ADS  Google Scholar 

  54. H. J. Lee, I. W. Kim, J. S. Kim, C. W. Ahn and B. H. Park, Appl. Phys. Lett. 94, 092902 (2009).

    ADS  Google Scholar 

  55. C. W. Ahn, E. D. Jeong, S. Y. Lee, H. J. Lee, S. H. Kang and I. W. Kim, Appl. Phys. Lett. 93, 212905 (2008).

    ADS  Google Scholar 

  56. K. Tanaka, H. Hayashi, K-I. Kakimoto, H. Ohsato and T. Iijima, Jpn. J. Appl. Phys. 46, 6964 (2007).

    ADS  Google Scholar 

  57. Y. Nakashima, W. Sakamoto, T. Shimura and T. Yogo, Jpn. J. Appl. Phys. 46, 6971 (2007).

    ADS  Google Scholar 

  58. L. Wang, K. Yao, P. C. Goh and W. Ren, J. Mater. Research 24, 3516 (2009).

    ADS  Google Scholar 

  59. A. Kupec, B. Malic, J. Tellier, E. Tchernychova, S. Glinsek and M. Kosec, J. Am. Ceram. Soc. 95, 515 (2012).

    Google Scholar 

  60. G. Li, X-Q. Wu, W. Ren, P. Shi, X-F. Chen and X. Yao, Ceram. International 38, S279 (2012).

  61. A. Kupec, H. Uršič, R. C. Frunzˇa, E. Tchernychova and B. Malič, J. Eur. Ceram. Soc. 35, 3507 (2015).

    Google Scholar 

  62. G. Li, X. Wu, W. Ren and P. Shi, Thin Solid Films 548, 556 (2013).

    ADS  Google Scholar 

  63. C. Ahn, S. Lee, H. Lee, A. Ullah, J. Bae, E. Jeong, J. Choi, B. Park and I. Kim, J. Phys. D: Appl. Phys. 42, 215304 (2009).

    ADS  Google Scholar 

  64. C. W. Ahn, H-I. Hwang, K. S. Lee, B. M. Jin, S. Park, G. Park, D. Yoon, H. Cheong, H. J. Lee and I. W. Kim, Jpn. J. Appl. Phys. 49, 095801 (2010).

    ADS  Google Scholar 

  65. S. Y. Lee, J. S. Kim, C. W. Ahn, H. I. Hwang and I. W. Kim, Thin Solid Films 519, 947 (2010).

    ADS  Google Scholar 

  66. X. Yan, W. Ren, X. Wu, P. Shi and X. Yao, J. Alloys Compd. 508, 129 (2010).

    Google Scholar 

  67. M. M. Akmal, A. Warikh, U. Azlan, N. Azmi, M. Salleh and M. Kasim, Ceram. Int. 44, 317 (2018).

    Google Scholar 

  68. S. Wiegand, S. Flege, O. Baake and W. Ensinger, J. Alloys Compd. 548, 38 (2013).

    Google Scholar 

  69. Q. Yu, J. F. Li, Y. Chen, L. Q. Cheng, W. Sun, Z. Zhou and Z. Wang, J. Am. Ceram. Soc. 97, 107 (2014).

    Google Scholar 

  70. S. Khartsev, A. Grishin, J. Andrèasson, J-H. Koh and J-S. Song, Integ. Ferroelectrics 55, 769 (2003).

    Google Scholar 

  71. X. Wang, S. Olafsson, L. D. Madsen, S. Rudner, I. P. Ivanov, A. Grishin and U. Helmersson, J. Materials Res. 17, 1183 (2002).

    ADS  Google Scholar 

  72. J. Kim, I. Hwang, S. Hong, J. Lee, B. Park, A. C. Woo and N. Sahn, J. Korean Phys. Soc. 48, 1583 (2006).

    Google Scholar 

  73. J. S. Kim, H. J. Lee, S. Y. Lee, I. W. Kim and S. D. Lee, Thin Solid Films 518, 6390 (2010).

    ADS  Google Scholar 

  74. H. J. Lee, I. W. Kim and B. M. Jin, J. Korean Phys. Soc. 56, 417 (2010).

    ADS  Google Scholar 

  75. B-Y. Kim, T-G. Seong, I-T. Seo, J-S. Kim, C-Y. Kang, S-J. Yoon and S. Nahm, Acta. Materialia 60, 7034 (2012).

    Google Scholar 

  76. J. Wu and J. Wang, J. Appl. Phys. 106, 066101 (2009).

    ADS  Google Scholar 

  77. T. Li, G. Wang, K. Li, G. Du, Y. Chen, Z. Zhou, D. Rémiens and X. Dong, Ceram. Int. 40, 1195 (2014).

    Google Scholar 

  78. S. Y. Lee, C. W. Ahn, A. Ullah, H. J. Seog, J. S. Kim, S. H. Bae and I. W. Kim, Curr. Appl. Phys. 11, S266 (2011).

    ADS  Google Scholar 

  79. S. Y. Lee, H. J. Seog, C. W. Ahn, A. Ullah and I. W. Kim, Jpn. J. Appl. Phys. 51, 09MD03 (2012).

    Google Scholar 

  80. H. J. Seog, C. W. Ahn, S. Cho, K. E. Kim, C. H. Yang, T. Y. Koo, S. Y. Lee, J. P. Kim and I. W. Kim, Physica Status Solidi RRL 11, 1600235 (2017).

    ADS  Google Scholar 

  81. J. Chen, Y. Luo, X. Ou, G. Yuan, Y. Wang, Y. Yang, J. Yin and Z. Liu, J. Appl. Phys. 113, 204105 (2013).

    ADS  Google Scholar 

  82. M. Boota, E. P. Houwman, M. D. Nguyen, G. Lanzara and G. Rijnders, AIP Advances 6, 055303 (2016).

    ADS  Google Scholar 

  83. J. Park, S. S. Won, C. W. Ahn and I. W. Kim, J. Am. Ceram. Soc. 96, 146 (2013).

    Google Scholar 

  84. D. Shen, J-H. Park, J. H. Noh, S-Y. Choe, S-H. Kim, H. C. Wikle III and D-J. Kim, Sensors and actuators A: physical 154, 103 (2009).

    Google Scholar 

  85. S. S. Won, J. Lee, V. Venugopal, D-J. Kim, J. Lee, I. W. Kim, A. I. Kingon and S-H. Kim, Appl. Phys. Lett. 108, 232908 (2016).

    ADS  Google Scholar 

  86. L. Wang, W. Ren, P. Shi, X. Chen, X. Wu and X. Yao, Appl. Phys. Lett. 97, 072902 (2010).

    ADS  Google Scholar 

  87. L. Wang, W. Ren, P. Shi and X. Wu, J. Appl. Phys. 115, 034103 (2014).

    ADS  Google Scholar 

  88. Y. Sun, Y. Zhou, Q. Lu and S. Zhao, Physica Status Solidi RRL 12, 1700364 (2018).

    ADS  Google Scholar 

  89. J. S. Kim, S. Y. Lee, C. W. Ahn, H. I. Hwang, H. J. Lee, S. H. Bae and I. W. Kim, Jpn. J. Appl. Phys. 49, 095805 (2010).

    ADS  Google Scholar 

  90. T. P-C. Juan, S-M. Chen and J. Y-M. Lee, J. Appl. Phys. 95, 3120 (2004).

    ADS  Google Scholar 

  91. F. Lai, J-F. Li, Z-X. Zhu and Y. Xu, J. Appl. Phys. 106, 064101 (2009).

    ADS  Google Scholar 

  92. P. C. Goh, K. Yao and Z. Chen, Appl. Phys. Lett. 99, 092902 (2011).

    ADS  Google Scholar 

  93. C-C. Lin, C-C. Chen, C-M. Weng, S-Y. Chu, C-S. Hong and C-C. Tsai, J. Appl. Phys. 117, 085307 (2015).

    ADS  Google Scholar 

  94. S. Y. Lee, C. W. Ahn, J. S. Kim, A. Ullah, H. J. Lee, H-I. Hwang, J. S. Choi, B. H. Park and I. W. Kim, J. Alloys Compd. 509, L194 (2011).

    Google Scholar 

  95. S. Y. Lee, J. S. Kim, C. W. Ahn, A. Ullah, H. J. Lee and I. W. Kim, Curr. Appl. Phys. 11, S157 (2011).

    Google Scholar 

  96. C. W. Ahn, H. J. Seog, A. Ullah, S. Y. Lee, J. W. Kim, S. S. Kim, M. Park, K. No and I. W. Kim, J. Appl. Phys. 111, 024110 (2012).

    ADS  Google Scholar 

  97. J. S. Kim, C. W. Ahn, A. Ullah, S. A. Chae and I. W. Kim, J. Korean Phys. Soc. 68, 1461 (2016).

    ADS  Google Scholar 

  98. L. Wang, R. Zuo, L. Liu, H. Su, M. Shi, X. Chu, X. Wang and L. Li, Mater. Chem. Phys. 130, 165 (2011).

    Google Scholar 

  99. H. J. Lee, C. W. Ahn, S. S. Won, A. Tange, B. C. Park, H. J. Seog and I. W. Kim, J. Korean Phys. Soc. 66, 1401 (2015).

    ADS  Google Scholar 

  100. T. Shiraishi, N. Kaneko, M. Kurosawa, H. Uchida, T. Hirayama and H. Funakubo, Jpn. J. Appl. Phys. 53, 05FE02 (2014).

    Google Scholar 

  101. T. Li, G. Wang, D. Remiens and X. Dong, Ceram. Int. 39, 1359 (2013).

    Google Scholar 

  102. Q. Yu, J-F. Li, W. Sun, Z. Zhou, Y. Xu, Z-K. Xie, F-P. Lai and Q-M. Wang, J. Appl. Phys. 113, 024101 (2013).

    ADS  Google Scholar 

  103. T. Li, G. Wang, K. Li, N. Sama, D. Remiens and X. Dong, J. Am. Ceram. Soc. 96, 787 (2013).

    Google Scholar 

  104. L. S. Kang, B. Y. Kim, I. T. Seo, T. G. Seong, J. S. Kim, J. W. Sun, D. S. Paik, I. Hwang, B. H. Park and S. Nahm, J. Am. Ceram. Soc. 94, 1970 (2011).

    Google Scholar 

  105. L. Wang, W. Ren, K. Yao, P. C. Goh, P. Shi, X. Wu and X. Yao, J. Am. Ceram. Soc. 93, 3686 (2010).

    Google Scholar 

  106. L. Wang, W. Ren, K. Yao, P. Shi, X. Wu and X. Yao, Ceram. Int. 38, S291 (2012).

    Google Scholar 

  107. J. Pavlič, B. Malič and T. Rojac, J. Am. Ceram. Soc. 97, 1497 (2014).

    Google Scholar 

  108. M. Dolhen, A. Mahajan, R. Pinho, M. E. Costa, G. Trolliard and P. M. Vilarinho, RSC Advances 5, 4698 (2015).

    Google Scholar 

  109. D. Wang, D. Lin, K. Kwok, N. Chan, J. Dai, S. Li and H. Chan, Appl Phys. Lett. 98, 022902 (2011).

    ADS  Google Scholar 

  110. M. Abazari, T. Choi, S. Cheong and A. Safari, J. Phys. D: Appl. Phys. 43, 025405 (2009).

    ADS  Google Scholar 

  111. S. Yamazoe, Y. Miyoshi, T. Hattori, H. Adachi and T. Wada, Jpn. J. Appl. Phys. 49, 09MA06 (2010).

    Google Scholar 

  112. N. Kondo, W. Sakamoto, B-Y. Lee, T. Iijima, J. Kumagai, M. Moriya and T. Yogo, Jpn. J. Appl. Phys. 49, 09MA04 (2010).

    Google Scholar 

  113. T. Matsuda, W. Sakamoto, B-Y. Lee, T. Iijima, J. Kumagai, M. Moriya and T. Yogo, Jpn. J. Appl. Phys. 51, 09LA03 (2012).

    Google Scholar 

  114. E. Martínez-Aguilar, J. Gervacio-Arciniega, X. Vendrell, J. Siqueiros-Beltrones and O. Raymond-Herrera, Scientific Reports 7, 17721 (2017).

    ADS  Google Scholar 

  115. X. Zhang, J. Liu, K. Zhu, J. Wang, Z. Li and J. Qiu, J. Mater. Sci.: Mater. Electron. 28, 487 (2017).

    Google Scholar 

  116. M. Abazari and A. Safari, J. Appl. Phys. 105, 094101 (2009).

    ADS  Google Scholar 

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Authors and Affiliations

  1. Department of Physics and Energy Harvest-Storage Research Center, University of Ulsan, Ulsan, 44610, Korea

    Hae Jin Seog

  2. Department of Physics, University of Science and Technology, Bannu, KPK, Pakistan

    Aman Ullah

  3. Department of Physics and Energy Harvest-Storage Research Center, University of Ulsan, Ulsan, 44610, Korea

    Chang Won Ahn & Ill Won Kim

  4. Division of Analysis and Research, Korea Basic Science Institute, Busan, 46742, Korea

    Sun Young Lee

  5. School of Materials Science and Engineering-Low Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology, Ulsan, 44919, Korea

    Jungmin Park

  6. Samsung Electro-mechanics Corporate R&D Institute, Suwon, 16678, Korea

    Hai Joon Lee

  7. School of Engineering, Brown University, Providence, Rhode Island, 02912, USA

    Sung Sik Won & Seung-Hyun Kim

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  1. Hae Jin Seog
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Seog, H.J., Ullah, A., Ahn, C.W. et al. Recent Progress in Potassium Sodium Niobate Lead-free Thin Films. J. Korean Phys. Soc. 72, 1467–1483 (2018). https://doi.org/10.3938/jkps.72.1467

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