Substrate Temperature Dependence of the Properties of Single-layer MoS2 Film deposited by Using Pulsed Laser Deposition
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Single-layer MoS2 films were deposited on sapphire substrates by using pulsed laser deposition. The substrate temperature dependence of the structural, optical and photoluminescence properties of single-layer MoS2 films was investigated. An increased substrate temperature improved the surface morphology and the crystal quality of the MoS2 films. Moreover, the absorption and the photoluminescence properties of the MoS2 films were enhanced. In addition, the mechanism underlying the effect of substrate temperature on the properties of single-layer MoS2 films is discussed.
KeywordsSingle-layer MoS2 film Substrate temperature Crystal quality Optical properties Photoluminescence properties
PACS numbers68.55.jd 81.15.Fg 78.30.−j
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This work was supported by the Science Foundation of China University of Petroleum, Beijing (No. 2462019 QNXZ04), and by the National Nature Science Foundation of Beijing (No. 4142047).
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