Alkali Metal-Assisted Growth of Single-Layer Molybdenum Disulfide
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We report alkali metal-assisted growth of monolayer molybdenum disulfide (MoS2) by chemical vapor deposition. Single-layer MoS2 flakes with high-quality and large-scale (>∼200 μm) are successfully fabricated on alkali metal-coated SiO2 substrates. On the other hand, particle-like MoS2 tends to grow on bare SiO2 substrates. Detailed growth process of layered MoS2 with surface-coated alkali metal is suggested. A series of experimental and theoretical results indicate that alkali metals play a role in strong surface adsorption and re-supply of molybdenum precursor to the growth surface during lateral growth of MoS2. We believe that our results will provide fruitful information for large-scale or selective-area growth of single-layered transition metal dichalcogenides.
KeywordsChemical vapor deposition Molybdenum disulfide Single-layer Alkali metal Adsorption
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This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. 2019R1A2C1002844) and the Ministry of Education (No. 2016R1A6A1A03012877). It was also partially supported by the research program of Dongguk University, 2017.
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