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Journal of the Korean Physical Society

, Volume 73, Issue 12, pp 1855–1862 | Cite as

Electron Collision Cross Sections for the TRIES Molecule and Electron Transport Coefficients in TRIES-Ar and TRIES-O2 Mixtures

  • Phan Thi Tuoi
  • Do Anh Tuan
  • Pham Xuan Hien
Article
  • 4 Downloads

Abstract

A reliable set of low-energy electron collision cross sections for the triethoxysilane (TRIES) molecule was derived based on the measured electron transport coefficients for a pure TRIES molecule by using an electron swarm method and a two-term approximation of the Boltzmann equation. The electron transport coefficients calculated using the derived set are in good agreement with experimental value over a wide range of E/N values (ratio of the electric field E to the neutral number density N). The present electron collision cross section set for the TRIES molecule, therefore, is the most reliable so far for plasma discharges and for materials processing using the TRIES molecule. Moreover, the electron transport coefficients for the TRIES-Ar and the TRIES-O2 mixtures were also calculated and analyzed over a wide range of E/N for the first time.

Keywords

Electron collision cross section Triethoxysilane [Hsi(OC2H5)3TRIES molecule Electron swarm study Electron transport coefficient Boltzmann equation analysis 

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Copyright information

© The Korean Physical Society 2018

Authors and Affiliations

  1. 1.Faculty of Electronics and Electrical EngineeringHung Yen University of Technology and EducationHung YenVietnam
  2. 2.Department of Mechanical EngineeringUniversity of Transport and CommunicationsHanoiVietnam

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