Abstract
A method has been developed and investigated to measure the fabrication accuracy of precision synthesized structures by circular laser writing systems using special microstructures formed in two orthogonal directions. These microstructures consist of two parts, one of which is formed before precision structure fabrication, and the second during this process. The shift between the first and second part of the microstructure can be used to determine the errors due to drift, substrate shift, etc. in each of the coordinate directions. The method provides increased accuracy and certification reliability in the fabrication of precision synthesized structures..
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Acknowledgments
We are grateful to V. P. Korolkov, Dr. Tech. Sci., and R. K. Nasyrov, Cand. Tech. Sci., for useful discussions of laser writing technology and optical systems, and also to A. R. Sametov, leading optics engineer, and A. I. Malyshev, leading process engineer, for the preparation and fabrication of test and experimental DOEs on CLWS300IAE. The studies were carried out on the equipment of the Multiple-access center “High-resolution spectroscopy of gases and condensed matters at the Institute of Automation and Electrometry, SB RAS.
Funding
This work was supported by the Ministry of Higher Education and Science of the Russian Federation (state registration No. AAAA-A17-117052210002-7)
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Russian Text © The Author(s), 2019, published in Avtometriya, 2019, Vol. 55, No. 3, pp. 113–119.
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Shimansky, R.V. Error Measurement Method in the Fabrication of Precision Synthesized Holograms on Circular Laser Writing Systems. Optoelectron.Instrument.Proc. 55, 303–308 (2019). https://doi.org/10.3103/S8756699019030130
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DOI: https://doi.org/10.3103/S8756699019030130