Abstract
To develop nanostructures with extremely low spatial resolution (to 10 nm and below), a new concept of the use of arrays of microfocus X-ray tubes based on field emission silicon nanocathodes is proposed. A new λ-tunable microfocus source of X-ray radiation, based on a thinfilm transmission target with field emission nanocathode with tunable wavelength, is proposed. The possibility of decreasing the exposed area size to 20 nm and smaller by varying the tube blocking voltage is shown. The use of these X-ray sources opens a new way of developing maskless X-ray lithography.
Similar content being viewed by others
References
M. M. Waldrop, Nature 530, 7589 (2016).
https:// 4pda. ru/2017/03/29/338955.
B. Wu and A. Kumar, Appl. Phys. Rev. 1, 011104 (2014).
http://semimd.com/blog/2016/11/28/high-na-euv-lithography-investment/.
I. Servin et al., Proc. SPIE 9423, 94231C (2015).
N. Choksi et al., J. Vac. Sci. Technol. B 17, 3047 (1999).
N. I. Chkhalo, V. N. Polkovnikov, N. N. Salashchenko, and M. N. Toropov, Proc. SPIE 10224, 1022410-1-08 (2016).
N. I. Chkhalo and N. N. Salashchenko, AIP Advances 3, 082130 (2013).
J. Zhao, Y. Wu, C. Xue, et al., Microelectron. Eng. 170, 49 (2017).
N. A. Dyuzhev et al., Poverkhnost No. 4, 1 (2017) [J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11, 443 (2017)].
V. A. Bespalov et al., Poverkhnost [J. Surf. Invest.: X-ray, Synchrotron Neutron Tech.] (in press).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © N.A. Dyuzhev, G.D. Demin, T.A. Gryazneva, A.E. Pestov, N.N. Salashchenko, N.I. Chkhalo, F.A. Pudonin, 2018, published in Kratkie Soobshcheniya po Fizike, 2018, Vol. 45, No. 1, pp. 56–63.
About this article
Cite this article
Dyuzhev, N.A., Demin, G.D., Gryazneva, T.A. et al. Microfocus X-Ray Tubes with a Silicon Autoemission Nanocathode as an X-Ray Source. Bull. Lebedev Phys. Inst. 45, 1–5 (2018). https://doi.org/10.3103/S1068335618010013
Received:
Published:
Issue Date:
DOI: https://doi.org/10.3103/S1068335618010013