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Formation of flat surfaces of optoelectronic components in diamond polishing

  • Investigation of Machining Processes
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Abstract

Based on the physical-statistical model of formation of workpiece material debris particles in diamond polishing, an analysis of removal rate and form accuracy has been performed for flat surfaces of optoelectronic components made of quartz, aluminum nitride, and gallium nitride. The most efficient values of kinematic parameters of machine tool setting have been defined to achieve the required shape-generation accuracy. The paper provides some findings of the experimental verification of calculated data on the removal rate in polishing and the form deviation of the machined surfaces.

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References

  1. Fahnle, O.W., Wons, T., Koch, E., et al., ITIRM as a tool for qualifying polishing processes, Appl. Optics, 2002, vol. 41, no. 19/1, pp. 4036–4038.

    Article  Google Scholar 

  2. Ouma, D.O., Boning, D.S., Chung, J.E., et al., Characterization and modeling of oxide chemical-mechanical polishing using planarization length and pattern density concepts, IEEE Transactions on Semiconductor Manufacturing, 2002, vol. 15, no. 2, pp. 232–243.

    Article  Google Scholar 

  3. Vukkadala, P., Turner, K.T., and Sinha, J.K., Impact of wafer geometry on CMP for advanced nodes, J. Electrochem. Soc., 2011, vol. 158, no. 10, pp. 1002–1009.

    Article  Google Scholar 

  4. Filatov, Yu.D., Filatov, O.Yu., Monteil, G., et al., Bound-abrasive grinding and polishing of surfaces of optical materials, Optical Eng., 2011, vol. 50, no. 6, art. 063401.

    Article  Google Scholar 

  5. Filatov, Yu.D. and Sidorko, V.I., A statistical approach to wear of surfaces of nonmetallic workpiece in polishing, Sverkhtverdye Materialy, 2005, no. 1, pp. 58–66 [J. Superhard Mater., 2005,no. 1].

    Google Scholar 

  6. Filatov, Yu. and Sidorko V., Formation of flat optical surfaces in polishing, Jemna Mechanika a Optika, 2009, no. 9, pp. 239–243.

    Google Scholar 

  7. Filatov, O.Yu., Sidorko, V.I., Kovalev, S.V., Filatov, Yu.D., and Vetrov, A.G., Material removal rate in polishing anisotropic monocrystalline materials for optoelectronics, J. Superhard Mater., 2016, vol. 38, no. 2, pp. 123–131.

    Article  Google Scholar 

  8. Galashev, A.Y., Computer study of the Raman spectra and infrared optical properties of gallium nitride and gallium arsenic nanoparticles with SiO2 core and shell, J. Nanopart. Res., 2014, no. 16, pp. 2351–2368.

    Article  Google Scholar 

  9. Crystal quartz, Almaz Optics, Inc. (Quartz, crystal quartz, crystalline quartz), http://www.almazoptics.com/ Quartz.htm

  10. Properties of the III-nitride semiconductors. The semiconductors–information., http://www.semiconductors.co. uk/nitrides.htm

  11. Davydov, V.Yu., Kitaev, Yu.E., Goncharuk, I.N., et al., Phonon dispersion and Raman scattering in hexagonal GaN and AlN, Phys. Rev. B, 1998, vol. 58, no. 19, pp. 12899–12907.

    Article  CAS  Google Scholar 

  12. Harima, H., Properties of GaN and related compounds studied by means of Raman scattering, J. Phys.: Condens. Matter., 2002, vol. 14, pp. 967–993.

    Google Scholar 

  13. Quay, R., Gallium Nitride Electronics, Springer Science & Business Media, 2008.

    Google Scholar 

  14. Filatov, O.Yu., Vetrov, A.G., Sidorko, V.I., Filatov, Yu.D., and Kovalev, S.V., A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide, J. Superhard Mater., 2013, vol. 35, no. 5, pp. 303–308.

    Article  Google Scholar 

  15. Filatov, Yu.D., Vetrov, A.G., Sidorko, V.I., Filatov, O.Yu., et al., Polishing of optoelectronic components made of monocrystalline silicon carbide, J. Superhard Mater., 2015, vol. 37, no. 1, pp. 48–56.

    Article  Google Scholar 

  16. Filatov, Yu.D., Filatov, O.Yu., Monteil, G., et al., Bound-abrasive grinding and polishing of surfaces of optical materials, Proc. SPIE, 2010, vol. 7786, art. 778613.

    Article  Google Scholar 

  17. Filatov, Yu.D. and Rogov, V.V., A cluster model of fatigue wear mechanism of SiO2-containing materials in polishing with tools made of bound ceria-based polishing powders. Part 1, Sverkhtverdye Materaily, 1994, no. 3, pp. 40–43 [J. Superhard Mater., 1994, no. 3].

    Google Scholar 

  18. Filatov, Yu.D., The mechanism of the surface microrelief formation in glass polishing, Sverkhtverdye Materialy, 1991, no. 5, pp. 61–65 [J. Superhard Mater., 1991, no. 5].

    Google Scholar 

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Authors and Affiliations

  1. Bakul Institute for Superhard Materials, National Academy of Sciences of Ukraine, vul. Avtozavods’ka 2, Kiev, 04074, Ukraine

    Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev & A. G. Vetrov

Authors
  1. Yu. D. Filatov
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  2. V. I. Sidorko
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  3. S. V. Kovalev
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  4. A. G. Vetrov
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Corresponding author

Correspondence to Yu. D. Filatov.

Additional information

Original Russian Text © Yu.D. Filatov, V.I. Sidorko, S.V. Kovalev, A.G. Vetrov, 2017, published in Sverkhtverdye Materialy, 2017, Vol. 39, No. 2, pp. 71–77.

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Filatov, Y.D., Sidorko, V.I., Kovalev, S.V. et al. Formation of flat surfaces of optoelectronic components in diamond polishing. J. Superhard Mater. 39, 129–133 (2017). https://doi.org/10.3103/S1063457617020083

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  • DOI: https://doi.org/10.3103/S1063457617020083

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