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Modeling Transport in a System with Ballistic Focusing of a High Intensity Beam of Metal Ions

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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Major patterns of ion beam transport in a system with ballistic focusing are studied via numerical modeling. It is shown that the efficiency of transporting a beam of metal ions at 0.66 A and an ion energy of 1–3 keV depends on the voltage bias and plasma density in the beam’s drift space. Incomplete compensation for high-speed ions in the beam transport channel lowers the potential and (under certain conditions) produces a virtual anode. The ion-electron emission of electrons from targets and grid electrodes is an additional mechanism of compensating for the spatial charge of a beam of metal ions.

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REFERENCES

  1. Ryabchikov, A.I., Ananin, P.S., Dektyarev, S.V., et al., Vacuum, 2017, vol. 143, p. 447.

    Article  ADS  Google Scholar 

  2. Ryabchikov, A.I, Anan’in, P.S., Shevelev, A.E., and Sivin, D.O., Tech. Phys., 2018, vol. 63, no. 10, p. 1516.

    Article  Google Scholar 

  3. Ryabchikov, A.I., Shevelev, A.E., Sivin, D.O., et al., J. Appl. Phys., 2018, vol. 123, no. 23, p. 233301.

    Article  ADS  Google Scholar 

  4. Tarakanov, V.P., User’s Manual for Code KARAT, Springfield: Berkeley Research Associates, 1992.

    Google Scholar 

  5. Tarakanov, V.P., Matematicheskoe modelirovanie. Problemy i rezul’taty (Mathematical Modeling. Problems and Results), Moscow: Nauka, 2003, p. 456.

  6. André, A., et al., Handbook of Plasma Immersion Ion Implantation and Deposition, New York: Wiley, 2000.

    Google Scholar 

  7. Medved, B. and Strausser, Y.E., Adv. Electron. Electron Phys., 1965, vol. 21, p. 101.

    Article  Google Scholar 

  8. Grigorjev, V.P., Zherlitsyn, A.G., Kanaev, G.G., Koval’, T.V., Marchenko, A.L., Nguen, T.M., and Mel’nikov, G.V., J. Commun. Technol. Electron., 2013, vol. 58, no. 7, p. 720.

    Article  Google Scholar 

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Funding

This work was supported by the Russian Science Foundation, grant no. 17-19-01169.

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Authors and Affiliations

  1. Tomsk Polytechnic University, 634050, Tomsk, Russia

    T. V. Koval & Tran My Kim An

  2. Joint Institute for High Temperatures, Russian Academy of Sciences, 125412, Moscow, Russia

    V. P. Tarakanov

  3. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 115409, Moscow, Russia

    V. P. Tarakanov

Authors
  1. T. V. Koval
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  2. Tran My Kim An
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  3. V. P. Tarakanov
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Corresponding author

Correspondence to T. V. Koval.

Additional information

Translated by I. Moshkin

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Koval, T.V., An, T.M. & Tarakanov, V.P. Modeling Transport in a System with Ballistic Focusing of a High Intensity Beam of Metal Ions. Bull. Russ. Acad. Sci. Phys. 83, 1387–1391 (2019). https://doi.org/10.3103/S1062873819110145

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  • DOI: https://doi.org/10.3103/S1062873819110145

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