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Deposition of high-density silicon carbide coatings by fluidized-bed pyrolysis of chlorinated silane derivatives

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Abstract

Comparative analysis of the processes for preparation of high-density silicon carbide coatings by the fluidized-bed pyrolysis of the SiCl4 + CH4 + H2 + Ar and CH3SiCl3 + H2 + Ar mixtures on pyrocarboncoated zirconium carbide particles was performed. The degree of perfection of the atomic-crystalline structure of the SiC coatings and the influence of isothermal annealing on these parameters were studied by means of X-ray diffraction, neutron diffraction, metallography, and X-ray microprobe analysis.

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Authors and Affiliations

  1. NPO Luch Research Institute, Podolsk, Moscow oblast, Russia

    S. D. Kurbakov & T. A. Mireev

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  1. S. D. Kurbakov
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  2. T. A. Mireev
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Correspondence to S. D. Kurbakov.

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Original Russian Text © S.D. Kurbakov, T.A. Mireev, 2009, published in Khimiya Tverdogo Topliva, 2009, No. 2, pp. 60–72.

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Kurbakov, S.D., Mireev, T.A. Deposition of high-density silicon carbide coatings by fluidized-bed pyrolysis of chlorinated silane derivatives. Soil Fuel Chem. 43, 113–123 (2009). https://doi.org/10.3103/S0361521909020104

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  • DOI: https://doi.org/10.3103/S0361521909020104

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