Gigahertz MEMS Clock Generator
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An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS clock generator capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 106g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.
KeywordsMEMS clock generator self-supported oscillations stable limiting cycle mathematical model
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- 2.Ch. Zuo, J. van der Spiegel, and G. Piazza, “1.05 GHz MEMS Oscillator Based on Lateral-Field-Excited Piezoelectric AlN Resonators,” in Proc. of the Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (EFTF-IFCS 2009), Besancon, France, April 20–24, 2009, pp. 381–384.Google Scholar
- 3.D. Weinstein and S. A. Bhave, “Internal Dielectric Transduction of a 4.5 GHz Silicon Bar Resonator,” in IEEE International Electron Devices Meeting, Washington, USA, December 10–12, 2007, pp. 415–418.Google Scholar
- 9.E. G. Kostsov and A. A. Sokolov, “Fast-Response Electrostatic Actuator Based on Nano-Gap,” Micromachines 8(78), 2–7 (2017).Google Scholar
- 10.E. G. Kostsov and S. I. Fadeev, “New Microelectromechanical Cavities for Gigahertz Frequencies,” Avtometriya 49(2), 115–122 (2013) [Optoelectron., Instrum. Data Process. 49 (2), 204–210 (2013)].Google Scholar
- 11.A. A. Andronov, A. A. Vitte, and S. E. Khaikin, Theory of Oscillations (GIFML, Moscow, 1959) [in Russian].Google Scholar
- 12.Ya. B. Zel’dovich and A. D. Myshkis, Elements of Applied Mathematics (Nauka, Moscow, 1965), pp. 242–284 [in Russian].Google Scholar
- 15.H. Takamatsu and T. Sugiura, “Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage,” in Proc. of the Intern. Conf. on MEMS, NANO and Smart Systems (ICMENS 2005), Banff, Canada, July 24–27, 2005, pp. 423–424.Google Scholar
- 19.S. E. Lyshevski, Nano- and Microelectromechanical Systems (CRC Press, Boca Raton-London-New York, 2001).Google Scholar
- 21.S. Y. No and F. Ayazi, “The HARPSS Process for Fabrication of Nano-Precision Silicon Electromechanical Resonators,” in Proc. of the 1st IEEE Conf. on Nanotechnology, Mauli, USA, October 30–31, 2001, pp. 489–494.Google Scholar
- 22.E. G. Kostsov, A. I. Skurlatov, and A. M. Shcherbachenko, “Optoelectronic System for Studying Nanodisplacements of Moving MEMS Elements,” Avtometriya 54(4), 92–100 (2018) [Optoelectron., Instrum. Data Process. 54 (4), 397–404 (2018)].Google Scholar