Vacuum Ultraviolet and Soft X-ray Broadband Monochromator for a Synchrotron Radiation Metrological Station

  • P. S. Zavertkin
  • D. V. Ivlyushkin
  • M. R. Mashkovtsev
  • A. D. NikolenkoEmail author
  • S. A. Sutormina
  • N. I. Chkhalo
Physical and Engineering Fundamentals of Microelectronics and Optoelectronics


The monochromator of the Kosmos synchrotron radiation metrology station is discussed. The results of testing the monochromator in the energy range 2000–6000 eV using Si (111) crystals are presented. A spectral resolution ΔE/E = 10−4 was obtained. A technique for checking the spectral purity of the monochromatic radiation is described. It is shown that the monochromator can be used for spectroscopic measurements in the indicated energy range.


synchrotron radiation soft x-rays metrology monochromator 


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The work was performed using the infrastructure of the Siberian Center of Synchrotron and Terahertz Radiation based on the VEPP-3–VEPP-4M storage complex (Novosibirsk, Russia) and supported by the Ministry of Higher Education and Science of the Russian Federation (project RFMEFI62117X0012).


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© Allerton Press, Inc. 2019

Authors and Affiliations

  • P. S. Zavertkin
    • 1
  • D. V. Ivlyushkin
    • 1
  • M. R. Mashkovtsev
    • 1
  • A. D. Nikolenko
    • 1
    Email author
  • S. A. Sutormina
    • 1
  • N. I. Chkhalo
    • 2
  1. 1.Budker Institute of Nuclear Physics, Siberian BranchRussian Academy of SciencesNovosibirskRussia
  2. 2.Institute for Physics of MicrostructuresRussian Academy of SciencesNizhny NovgorodRussia

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