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Moscow University Physics Bulletin

, Volume 73, Issue 6, pp 627–631 | Cite as

Estimates Related to the Error Self-Compensation Mechanism in Optical Coatings Deposition

  • A. V. Tikhonravov
  • I. V. KochikovEmail author
  • I. A. Matvienko
  • S. A. Sharapova
  • A. G. Yagola
OPTICS AND SPECTROSCOPY. LASER PHYSICS
  • 1 Downloads

Abstract

This paper introduces an estimate for the strength of the correlation of layer thickness errors in the process of coating deposition with broadband optical monitoring. It is shown that a strong effect of self-compensation of deposition errors is observed in the case of a strong correlation of layer thickness errors. An estimate for the strength of this effect is introduced. Theoretical conclusions are confirmed by comparison with practical deposition results that demonstrate the presence of a strong self-compensation effect.

Keywords:

thin films optical coatings optical monitoring 

Notes

ACKNOWLEDGMENTS

This study was supported by the Russian Science Foundation (RSF) for research project no. 16-11-10219.

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Copyright information

© Allerton Press, Inc. 2018

Authors and Affiliations

  • A. V. Tikhonravov
    • 1
  • I. V. Kochikov
    • 1
    Email author
  • I. A. Matvienko
    • 2
  • S. A. Sharapova
    • 1
  • A. G. Yagola
    • 2
  1. 1.Research Computer Center, Moscow State UniversityMoscowRussia
  2. 2.Department of Physics, Moscow State UniversityMoscowRussia

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