Nanometer Resolution XANES Imaging ofin situ switched individual PC-RAM devices

Abstract

We report on the study of single devices of phase-change (Ge2Sb2Te5) memory cells in line cell type devices. Devices were investigated employing an x-ray nanobeam of only about 150 nm diameter, which could be fully contained within the spatial extent of the active area within a single device cell. XANES spectra showing the device in the amorphous and crystalline state have been successfully collected after switching the devicein situ at the synchrotron. By monitoring the fluorescence response of the sample constituent materials at a constant photon energy (corresponding to the Ge K-edge absorption edge) as a function of x-ray beam position on the sample 2D maps have been produced.

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Correspondence to Jan H. Richter.

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Richter, J.H., Kolobov, A.V., Fons, P. et al. Nanometer Resolution XANES Imaging ofin situ switched individual PC-RAM devices. MRS Online Proceedings Library 1563, 1–5 (2013). https://doi.org/10.1557/opl.2013.643

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