Fabrication of silicon nanowires by ion beam irradiation

Abstract

Silicon nanowires are becoming more important because of increasing requirements of the small scale and dense integration of devices. We report a top-down fabrication method for silicon nanowires using high-energy ion beam irradiation of bulk p-type silicon followed by electrochemical etching. Silicon nanowires with a diameter of ∼50nm have been fabricated and densely patterned nanowire arrays fabricated in different resistivity silicon wafers. With a suitable support structure, free standing silicon nanowires are also achieved. We investigate results depending on silicon wafer resistivity and location within the irradiated area.

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References

  1. 1.

    X. T. Zhou, J. Q. Hu, C. P. Li, D. D. D. Ma, C. S. Lee and S. T. Lee, Chemical Physics Letters, 369, 220 (2003).

    CAS  Article  Google Scholar 

  2. 2.

    Y. Cui, Q. Wei, H. Park, C. M. Lieber, Science 293, 1289 (2001).

    CAS  Article  Google Scholar 

  3. 3.

    L. D. Hicks, and M. S. Dresselhaus, Physical. Review B, 47, 24, (1993).

    Article  Google Scholar 

  4. 4.

    Y. Li, K. Buddharaju, N. Singh, G. Q. Lo and S. J. Lee, in IPEC, 2010 Conference Proceedings, p. 1181 (2010).

  5. 5.

    J. Amthor, O. Horn, T. Lipka and J. Müller, Proc. of SPIE 7366, 73661Y (2009).

    Article  Google Scholar 

  6. 6.

    M. Leisner, A. Cojocaru , E. Ossei-Wusu, J. Carstensen, H. Foll, Nanoscale Res Lett, 5,1502 (2010).

    CAS  Article  Google Scholar 

  7. 7.

    B. Eisenhawer, S. Sensfuss, V. Sivakov, M. Pietsch, G. Andra and F. Falk, Nanotechnology, 22 315401, (2011).

    CAS  Article  Google Scholar 

  8. 8.

    R. Rurali, Rev. Mod. Phys., 82, 1, (2010).

    Article  Google Scholar 

  9. 9.

    T. K. Sham, S. J. Naftel, P.-S. G. Kim, R. Sammynaiken, and Y. H. Tang, Physical. Review B, 70, 045313 (2004).

    Article  Google Scholar 

  10. 10.

    S. Bhattacharya and D. Banerjee, Appl. Phys. Lett., 85, 11, (2004).

    Google Scholar 

  11. 11.

    R. S. Wagner and W. C. Ellis, Appl. Phys. Lett. 4, 89 (1964).

    CAS  Article  Google Scholar 

  12. 12.

    Y. Shan and S. J. Fonash, ACS NANO. 2, 3, 429–434, (2008).

    CAS  Article  Google Scholar 

  13. 13.

    T. Stelzner, G. Andra, E. Wendler, W. Wesch, R. Scholz, U. Gosele and S. Christiansen, Nanotechnology 17, 2895 (2006).

    CAS  Article  Google Scholar 

  14. 14.

    S. D. Hutagalung, A. S. Y. Tan, R. Y. Tan, Y. Wahab, Proc. of SPIE, 7743 774305 (2010).

    Article  Google Scholar 

  15. 15.

    X. T. Vu, R. GhoshMoulick, J. F. Eschermann, R. Stockmann, A. Offenhäusser, S. Ingebrandt, Sensors and Actuators B, 144, 354, (2010).

    CAS  Article  Google Scholar 

  16. 16.

    J. Kedzierski, J. Bokor, C. Kisielowski, J. Vac. Sci. Technol. B, 15, 6, (1997).

    Article  Google Scholar 

  17. 17.

    M. B. H. Breese, F. J. T. Champeaux, E. J. Teo, A. A. Bettiol, and D. J. Blackwood Phys. Rev. B. 73, 035428 (2006).

    Article  Google Scholar 

  18. 18.

    S. Azimi, J. Song, Z. Y. Dang, H. D. Liang and M. B. H. Breese, J. Micromech. Microeng. 22, 113001(2012).

    Article  Google Scholar 

  19. 19.

    Y. S. Ow, H. D. Liang, S. Azimi, and M. B. H. Breese, Electrochem. Solid-State Lett. 14 (5) D45–D47 (2011).

    CAS  Article  Google Scholar 

  20. 20.

    S. Azimi, M. B. H. Breese, Z. Y. Dang, Y. Yan, Y. S. Ow and A. A. Bettiol, J. Micromech. Microeng. 22, 015015 (2012).

    Article  Google Scholar 

  21. 21.

    E. J. Teo, A. A. Bettiol, P. Yang, M. B. H. Breese, B. Q. Xiong, G. Z. Mashanovich, W. R. Headley, and G. T. Reed, Opt. Lett. 34, 659 (2009).

    CAS  Article  Google Scholar 

  22. 22.

    J. Song, Z. Y. Dang, S. Azimi, M. B. H. Breese, J. Forneris, and E. Vittone, ECS Journal of Solid State Science and Technology, 1 (2), P66–P69, (2012).

    CAS  Article  Google Scholar 

  23. 23.

    D. Mangaiyarkarasi, Y. S. Ow, M. B. H. Breese, V.L. Fuh, E.T. Xioasong, Opt. Express. 16, 12757 (2008).

    CAS  Article  Google Scholar 

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Correspondence to M. B. H. Breese.

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Song, J., Dang, Z.Y., Azimi, S. et al. Fabrication of silicon nanowires by ion beam irradiation. MRS Online Proceedings Library 1512, 9 (2013). https://doi.org/10.1557/opl.2013.423

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