Pb(Zr0.53Ti0.47)O3 (PZT) films have been fabricated on stainless steel substrates by a Polyvinylpirrolidone (PVP) modified sol-gel route. The single layer of about 0.26 μm was achieved by using the PVP-modified PZT sol, and Crack-free PZT films with thickness of up to 2.37 μm were fabricated by repeating the deposition process. The variations in crystallite orientation, microstructure, dielectric and ferroelectric properties of PZT films were investigated as a function of film thickness. Our results indicate that PZT films prepared on stainless steel substrates maintain good dielectric and ferroelectric properties.
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This work was supported by Shanghai education development foundation under grant No. 08SG41 and National Nature Science Foundation of China under Grant No. 50872080.
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Jiang, D., Zhao, C., Bu, S. et al. Preparation and Characterization of Pb(Zr,Ti)O3 films prepared by a modified sol-gel route. MRS Online Proceedings Library 1449, 41–46 (2012). https://doi.org/10.1557/opl.2012.849