Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique


This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.

This is a preview of subscription content, access via your institution.


  1. 1.

    J. A. Bean, A. Weeks and G. D. Boreman, “Performance optimization of antenna-coupled Al/AlOx/Pt tunnel diode infrared detectors”, IEEE J. Quantum Electron. 47, 126–135, (2011)

    CAS  Article  Google Scholar 

  2. 2.

    M. Dagenais, K. Choi, F. Yesilkoy, A. N. Chryssis and M. C. Peckerar, “Solar spectrum rectification using nano-antennas and tunneling diodes”, Optoelectronic Integrated Circuits, San Francisco, USA, January 27–28, 2010, Proc. SPIE 7605, 76050E, (2010)

    Google Scholar 

  3. 3.

    J. Alda, J. M. Rico-García, J. M. López-Alonso and G. Boreman, “Optical antennas for nano-photonic applications”, Nanotechnology, 16, S230–S234, (2005)

    CAS  Article  Google Scholar 

  4. 4.

    F. Stabler, “Automotive thermoelectric generators: design & manufacturing”, Proc. MRS Spring Meeting, San Francisco, USA, April 13–17, 2009, Symposium N: Materials and Devices for Thermal-to-Electric Energy Conversion

    Google Scholar 

  5. 5.

    K. M. Evenson, D. A. Jennings and F. R. Peterson, “Tunable far-infrared spectroscopy”, Appl. Phys. Lett., 44, 576–578, (1984)

    CAS  Article  Google Scholar 

  6. 6.

    S. P. Kwok, G. I. Haddad and G. Lobov, “Metal-Oxide-Metal (M-O-M) Detector”, J Appl. Phys., 42, 554–563, (1971)

    CAS  Article  Google Scholar 

  7. 7.

    L. E. Dodd, D. Wood and A. J. Gallant, “Optimizing MOM Diode Performance via the Oxidation Technique”, Proc. IEEE Sensors 2011, Limerick, Ireland, 28-31 October, 2011, 176–179

    Google Scholar 

  8. 8.

    B. Tiwari, J. A. Bean, G. Szakmany, G. H. Bernstein, P. Fay and W. Porod, “Controlled etching and regrowth of tunnel oxide for antenna-coupled metal-oxide-metal diodes”, J Vac. Sci. Technol., 27, 2153–2160, (2009)

    CAS  Article  Google Scholar 

Download references


The authors wish to thank Dr Mark Rosamond and Mr Leon Bowen for their assistance preparing samples using the FIB, Dr Budhika Mendis for the TEM images and finally Dr Richard Thompson for the RBS analysis.

Author information



Corresponding author

Correspondence to Linzi E. Dodd.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Dodd, L.E., Gallant, A.J. & Wood, D. Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique. MRS Online Proceedings Library 1415, 91–96 (2012). https://doi.org/10.1557/opl.2012.72

Download citation