Evidence and Characterization of Crystallographic Defect and Material Quality after SLIM-Cut Process


The SLIM-Cut process is a kerf-free wafering technique to obtain silicon substrates as thin as 50μm. The quality of the resulting material must be assessed to ensure that this innovative Si-foil approach does not jeopardize the potential efficiency of the final solar cell in terms of electronic activity, defect density and location. For that reason, we performed Microwave-Detected Photoconductance Decay (MW-PCD), Deep-Level Transient Spectroscopy (DLTS) and optical inspections after defect etching of the foils surface. Analyses indicate that SLIM-Cut generates crystallographic defects which create deep level traps that have a negative impact on the lifetime of the silicon foil. Nonetheless, a decrease of the thermal budget will lead to a reduction of plasticity and hence lower the amount of defects and increase the foil quality.

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  1. [1]

    F. Dross, et al., Applied Physics A: Materials Science & Processing, Vol. 89, 1, pp. 149–152

  2. [2]

    T. Ando et al., Micromechatronics and Human Science, 1997, pp. 55–60

    Google Scholar 

  3. [3]

    J. Samuels et al., Proc. R. Soc. Lond. A 421, 1989, pp. 1–53

    Google Scholar 

  4. [4]

    R.H. Folk II., et al., Mat. Res. Soc. Symp. Proc. Vol. 539, 1999, pp. 161–167

    CAS  Article  Google Scholar 

  5. [5]

    P.A. Basore et al., 21st IEEE PVSC, 21–25 May 1990, Kissimmee, FL

    Google Scholar 

  6. [6]

    J. Schmidt et al., J. Appl. Phys. 81, 6186 (1997)

    CAS  Article  Google Scholar 

  7. [7]

    D.V. Lang, JAP Vol. 45, Issue 7, 1974, pp. 3023–3032

    CAS  Google Scholar 

  8. [8]

    H. Rauh, “Wacker’s atlas for characterization of defects in silicon,” Wacker-Chemitronic GmbH (unpublished)

  9. [9]

    F. Ebrahimi et al., Materials Science and Engineering A268 (1999), pp. 116–126

    CAS  Article  Google Scholar 

  10. [10]

    M. Seibt et al., Physica Status Solidi (a), Vol. 202, Issue 5, pp. 911–920

Download references

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Correspondence to Alex Masolin.

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Masolin, A., Vaes, J., Dross, F. et al. Evidence and Characterization of Crystallographic Defect and Material Quality after SLIM-Cut Process. MRS Online Proceedings Library 1323, 405 (2011). https://doi.org/10.1557/opl.2011.984

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