Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport


We report on the realization of high precision hollow structures directly on silicon suitable for liquid and gas/vapor transport. The formation of hollow structures requires high aspect ratio etching combined with bulk back-side micro-machining to realize silicon-based membranes. The use of a slant angle deposition method has been used as an alternative method for three-dimensional lithography. The transfer of acetone vapor through such tiny holes shows an anomalous behavior where a sharp rise is observed followed by an exponential and gradual decay. These structures can be eventually used as mass ion separation devices.

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Correspondence to Z. Sanaee.

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Sanaee, Z., Mohajerzadeh, S., Mehran, M. et al. Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport. MRS Online Proceedings Library 1299, 505 (2011). https://doi.org/10.1557/opl.2011.60

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