Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport

Abstract

We report on the realization of high precision hollow structures directly on silicon suitable for liquid and gas/vapor transport. The formation of hollow structures requires high aspect ratio etching combined with bulk back-side micro-machining to realize silicon-based membranes. The use of a slant angle deposition method has been used as an alternative method for three-dimensional lithography. The transfer of acetone vapor through such tiny holes shows an anomalous behavior where a sharp rise is observed followed by an exponential and gradual decay. These structures can be eventually used as mass ion separation devices.

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References

  1. 1.

    M. R. Prausnitz, Advanced Drug Delivery Reviews 56, 581 (2004).

    CAS  Article  Google Scholar 

  2. 2.

    P. Khanna, J. A. Strom, J. I. Malone and S. Bhansali, Journal of Diabetes Science and Technology 2, 1122 (2008).

    Article  Google Scholar 

  3. 3.

    G. Holman, Y. Hanein, R. C. Wyeth, A. O. D. Willows, D. D. Denton and K. F. Böhringer, 2nd Annual International IEEE-EMBS special Topic Conference on Microtechnologies in Medicine and Biology, 225 (2002).

  4. 4.

    L.M. Yu, F.E.H. Tay, D.G. Guo, L. Xu and K.L. Yap, Sensors and Actuators A 151, 17 (2009).

    CAS  Article  Google Scholar 

  5. 5.

    L. Y. Chen, L. F. Velásquez-García, X. Wang, K. Teo and A. I. Akinwande, Technical Digest - International Electron Devices Meeting, IEDM, 843 (2007).

  6. 6.

    A. Sammak, S. Azimi, N. Izadi, B. Khadem Hosseinieh, and S. Mohajerzadeh, IEEE Journal of Microelectromechanical systems 16, pp. 912 (2007).

    Article  Google Scholar 

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Correspondence to Z. Sanaee.

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Sanaee, Z., Mohajerzadeh, S., Mehran, M. et al. Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport. MRS Online Proceedings Library 1299, 505 (2011). https://doi.org/10.1557/opl.2011.60

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