Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma

Abstract

In this article, (100) Ib diamond substrates are pre-treated for different durations in an O2/H2-plasma, influencing the etching of defects like unepitaxial crystals, flat top hillocks, and pyramidal hillocks [1-3]. Such procedure is used to prevent those to incorporate into the ~ 100μm thick CVD diamond film, which is subsequently grown on top. While the surface morphology and structure of substrates and films are studied by SEM, the time-resolved Light-Induced Transient Grating (LITG) technique provides information on the excess carrier parameters close to the front surface of the grown layers. This technique is particularly useful as it does not requires a separation of the CVD film from its substrate. It will be shown that O2/H2-plasma treatments of more than 150 minutes but less than 240 minutes largely reduce the incorporation of defects in the bulk of the grown film. This, in turn, influences the carrier dynamics as measured by LITG, but also the surface roughness and growth rate as shown by SEM.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    A. Tallaire, M. Kasu, K. Ueda and T. Makimoto, Diamond Rel. Mater. 17 (2008), 60

    CAS  Article  Google Scholar 

  2. 2.

    J. Achard, F. Silva, O. Brinza, X. Bonnin, V. Mille, R. Issaoui, M. Kasu and A. Gicquel, phys. stat. sol. (a) 206/9 (2009), 1949

    Article  Google Scholar 

  3. 3.

    F. Silva, J.Achard, X. Bonnin, A. Michau, A. Tallaire, O. Brinza and A. Gicquel, phys. stat. sol. (a) 203 (2006), 3049

    CAS  Article  Google Scholar 

  4. 4.

    G. Bogdan, M. Nesládek, J. D’Haen, J. Maes, V.V. Moshchalkov, K. Haenen and M. D’Olieslaeger, phys. stat. sol. (a) 202/11 (2005), 2066

    Article  Google Scholar 

  5. 5.

    F. Silva, J. Achard, X. Bonnin, O. Brinza, A. Michau, A. Secroun, K. De Corte, S. Felton, M. Newton and A. Gicquel, Diamond Rel. Mater. 17 (2008), 1067

    CAS  Article  Google Scholar 

  6. 6.

    T. Teraji, M. Hamada, H. Wada, M. Yamamoto, T. Ito, Diamond Rel. Mater. 14 (2005), 1747

    CAS  Article  Google Scholar 

  7. 7.

    A. Tallaire, J. Achard, F. Silva, R.S. Sussmann, A. Gicquel and E. Rzepka, phys. stat. sol. (a) 201 (2004), 2419

    CAS  Article  Google Scholar 

  8. 8.

    T. Malinauskas, K. Jarasiunas, E. Ivakin, V. Ralchenko, A. Gontar and S. Ivakhnenko, Diamond Rel. Mater. 17 (2008), 1212

    CAS  Article  Google Scholar 

  9. 9.

    T. Malinauskas, K. Jarasiunas, E. Ivakin, N. Tranchant and M. Nesladek, phys. stat. sol. (a), 207 (2010), 2058

    CAS  Article  Google Scholar 

  10. 10.

    A. Kadys, M. Sudzius, K. Jarasiunas, O. Fochuk, O. Feychuk, M.L. Hellin and D. Verstraeten, phys. stat. sol. (b) 244 (2007), 1675

    CAS  Article  Google Scholar 

  11. 11.

    T. Malinauskas, R. Aleksiejunas, K. Jarasiunas, B. Beaumont, P. Gibart, A. Kakanakova-Georgieva, E. Janzen, D. Gogova, B. Monemar and M. Heuken, Journal of Crystal Growth 300 (2007), 223

    CAS  Article  Google Scholar 

  12. 12.

    W. Deferme, A. Bogdan, G. Bogdan, K. Haenen, W. De Ceuninck, M. Nesládek, phys. stat. sol. (a) 204/9 (2007), 3017

    Google Scholar 

  13. 13.

    J. Isberg, J. Hammersberg, D.J. Twitchen and A.J Whitehead, Diamond Rel. Mater. 13 (2004), 320

    CAS  Article  Google Scholar 

  14. 14.

    F. Fujita, Y. Oshiki, J.H. Kaneko, A. Homma, K. Tsuji, K. Meguro, Y. Yamamoto, T. Imai, H. Watanabe, T. Teraji, S. Kawamura and M. Furusaka, Diamond Rel. Mater. 15 (2006), 1921

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to W. Deferme.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Deferme, W., Haenen, K., Nesládek, M. et al. Carrier lifetime, diffusion length and mobility in (100) CVD diamond samples pre-treated in an O2/H2-plasma. MRS Online Proceedings Library 1282, 304 (2010). https://doi.org/10.1557/opl.2011.439

Download citation