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Simulation of Defects and Diffusion Phenomena in Silicon

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Authors
  1. Mark E. Law
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  2. George H. Gilmer
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  3. Martin Jaraíz
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Law, M.E., Gilmer, G.H. & Jaraíz, M. Simulation of Defects and Diffusion Phenomena in Silicon. MRS Bulletin 25, 45–50 (2000). https://doi.org/10.1557/mrs2000.98

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