Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection

Abstract

We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young’s modulus of 28 ±11 MPa, a large elastic strain of 24 ±12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.

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Acknowledgments

This work was supported in part by a Grant-in-Aid for Young Scientists (A) (26709025), Grant-in-Aid for Scientific Research (B) (18H03539), and Grant-in-Aid for Scientific Research on Innovative Areas (18H05469) from the Japan Society for the Promotion of Science, and by the Precursory Research for Embryonic Science and Technology (PRESTO) (JPMJPR1526 and JPMJPR152A) from the Japan Science and Technology Agency.

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Correspondence to Kazuhiro Takahashi or Toshinori Fujie.

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This author was an editor of this journal during the review and decision stage. For the JMR policy on review and publication of manuscripts authored by editors, please refer to http://www.mrs.org/editor-manuscripts/.

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The supplementary material for this article can be found at https://doi.org/10.1557/mrc.2019.11

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Takahashi, K., Fujie, T., Teramoto, R. et al. Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. MRS Communications 9, 381–389 (2019). https://doi.org/10.1557/mrc.2019.11

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