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Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition

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Abstract

Nitrogen (N) and boron (B) codoped diamond-like carbon (DLC) films were prepared on silicon oxide substrates by RF magnetron sputtering to optimize the electrical conductivity and hardness of DLC film. The electrical conductivity and hardness of the N-B codoped DLC films were controlled simultaneously by varying N2 flow rate with fixed B target power and varying B target power with fixed N2 flow rate. The electrical resistivity of the B-doped DLC films showed a cup-shaped relationship with B target power and a U-shaped relationship with the N-B codoped DLC film. However, hardness of the B-doped DLC films showed a decreasing behavior but it was maintained almost constant for the N-B codoped DLC film. These particular electrical and hardness behaviors of the N-B codoped DLC films could be explained by a neutralization effect of N and B codoping.

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References

  1. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, and J. Koskinen: Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy. Phys. Rev. B: Condens. Matter 48, 4777 (1993).

    Article  CAS  Google Scholar 

  2. A.A. Voevodin, M.S. Donley, J.S. Zabinski, and J.E. Bultman: Mechanical and tribological properties of diamond-like coatings prepared by pulsed laser deposition. Surf. Coat. Technol. 16-11, 534 (1995).

    Article  Google Scholar 

  3. A. Grill: Diamond-like carbon: State of the art. Diamond Relat. Mater. 8, 428 (1999).

    Article  CAS  Google Scholar 

  4. A. Grill: Diamond-like carbon coatings as biocompatible materials an overview. Diamond Relat. Mater. 12, 166 (2003).

    Article  CAS  Google Scholar 

  5. T. Nakatani, K. Okamoto, I. Omura, and S. Yamashita: Application of diamond-like-carbon coating to a coronary artery drug-eluting stent. J. Photopolym. Sci. Technol. 20, 221 (2007).

    Article  CAS  Google Scholar 

  6. J. Robertson: Diamond like amorphous carbon. Mater. Sci. Eng., R 37, 129 (2002).

    Article  Google Scholar 

  7. A.A. Voevodin and M.S. Donley: Preparation of amorphous diamond-like carbon by pulsed laser deposition: A critical review. Surf. Coat. Technol. 82, 199 (1996).

    Article  CAS  Google Scholar 

  8. H. Tsai and D.B. Bogy: Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording. J. Vac. Sci. Technol, A 5, 3287 (1987).

    Article  CAS  Google Scholar 

  9. H-S. Jung and H-H. Park: Determination of local bonding configuration and structural modification in amorphous carbon with silicon incorporation. Diamond Relat. Mater. 12, 1373 (2003).

    Article  CAS  Google Scholar 

  10. H-S. Jung and H-H. Park: Structural and electrical properties of co-sputtered fluorinated amorphous carbon film. Thin Solid Films 420, 248 (2002).

    Article  Google Scholar 

  11. J. Lee, D.A. Tryk, A. Fujishima, and S.M. Park: Electrochemical generation of ferrate in acidic media at boron-doped diamond electrodes. Chem. Commun. 5, 486 (2002).

    Article  Google Scholar 

  12. A. Sikora, O. Bourgeois, J.C. Sanchez-Lopez, J-N. Rouzaud, T.C. Rojas, A-S. Loir, J-L. Garden, F. Garrelie, and C. Donnet: Effect of boron incorporation on the structure and electrical properties of diamond-like carbon films deposited by femtosecond and nanosecond pulsed laser ablation. Thin Solid Films 518, 1470 (2009).

    Article  CAS  Google Scholar 

  13. H-S. Jung and H-H. Park: Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering. Appl. Surf. Sci. 216, 149 (2003).

    Article  CAS  Google Scholar 

  14. A.Y. Liu and M.L. Cohen: Prediction of new low compressibility solids. Science 245, 841 (1989).

    Article  CAS  Google Scholar 

  15. Y.S. Gu, Y.P. Zhang, Z.J. Duan, X.R. Chang, Z.Z. Tian, N.X. Chen, C. Dong, D.X. Shi, X.F. Zhang, and L. Yuan: Crystalline P-C3N4 synthesized by MPCVD. J. Mater. Sci. 34, 3117 (1999).

    Article  CAS  Google Scholar 

  16. J. Diaz, S. Anders, X. Zhou, E.J. Moler, S.A. Kellar, and Z. Hussain: Analysis of the π* and σ* bands of the x-ray absorption spectrum of amorphous carbon. Phys. Rev. B: Condens. Matter 64, 125204 (2001).

    Article  Google Scholar 

  17. S. Marinković, Č. Sužnjević, and I. Dezarov: Simultaneous pyrolytic deposition of carbon and boron. Carbon 7, 185 (1969).

    Article  Google Scholar 

  18. B. Ottaviani: Ph.D. Thesis, Université Bordeaux I, France, 1996.

    Google Scholar 

  19. J.J. Hauser: Electrical, structural and optical properties of amorphous carbon. J. Non-Cryst. Solids 23, 21 (1977).

    Article  Google Scholar 

  20. H.O. Pierson: Handbook of Refractory Carbides and Nitrides: Properties, Characteristics, Processing and Applications (Noyes Publications, Westwood, NJ, 1996).

    Google Scholar 

  21. N.M. Rodriguez and R.T.K. Baker: Fundamental studies of the influence of boron on the graphite-oxygen reaction using in situ electron microscopy techniques. J. Mater. Res. 8, 1886 (1993).

    Article  CAS  Google Scholar 

  22. S. Souto, M. Pickholz, M.C. dos Santos, and F. Alvarez: Electronic structure of nitrogen-carbon alloys (α-CNx) determined by photo-electron spectroscopy. Phys. Rev. B 57, 2536 (1998).

    Article  CAS  Google Scholar 

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Acknowledgment

This work was supported by the Industrial Strategic Technology Development Program (KI002182, TFT backplane technology for next generation displays) funded by the Ministry of Knowledge Economy (MKE, Korea).

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Yonsei University, Seoul, 120-749, Korea

    Chang-Sun Park, Sun Gyu Choi & Hyung-Ho Park

  2. Department of Display and Semiconductor Physics, Korea University, Sejong, 339-700, Korea

    Jin-Nyoung Jang & MunPyo Hong

  3. Department of Control and Instrumentation Engineering, Korea University, Sejong, 339-700, Korea

    Kwang-Ho Kwon

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  1. Chang-Sun Park
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Park, CS., Gyu Choi, S., Park, HH. et al. Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition. Journal of Materials Research 27, 3027–3032 (2012). https://doi.org/10.1557/jmr.2012.348

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